Effect of substrate temperature on aligned high-density carbon nanotubes deposited by RF-PECVD

被引：0

作者：

张楷亮 ^{[1
]}

林新元 ^{[1
]}

许旺 ^{[1
]}

苗银萍 ^{[1
]}

胡凯 ^{[1
]}

张勇 ^{[1
]}

机构：

[1] Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Electronics Information Engineering, Tianjin University of Technology

来源：

OptoelectronicsLetters | 2011年 / 7卷 / 02期

基金：

中国国家自然科学基金;

关键词：

Effect of substrate temperature on aligned high-density carbon nanotubes deposited by RF-PECVD; CNTs; RF; high;

D O I：

暂无

中图分类号：

TN304.055 [];

学科分类号：

0805 ; 080501 ; 080502 ; 080903 ;

摘要：

The high-density carbon nanotubes (CNTs) are synthesized on Fe/Si substrate in the mixture of acetylene and hydrogen gas by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The effects of substrate temperature on the growth of CNTs are studied by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy. The quality of CNTs is improved considerably by increasing the substrate temperature while the beam density is increased and graphitization degree (ID/IG) is enhanced. The best aligned CNTs are prepared at 750 oC, the beam density is about 1.6 × 103/μm2, and ID/IG is about 0.93. Temperature influence is also discussed.

引用

页码：85 / 87

页数：3

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