Resonance-mode effect on piezoelectric microcantilever performance in air,with a focus on the torsional modes

被引：0

作者：

邱华诚 ^{[1
,2
]}

Dara Feili ^{[1
]}

吴学忠 ^{[2
]}

Helmut Seidel ^{[1
]}

机构：

[1] Saarland University,Chair of Micromechanics,Microfluidics/Microactuators, Saarbrücken

[2] National University of Defense Technology,College of Mechanical Engineering and Automation

来源：

Chinese Physics B | 2014年 / 23卷 / 02期

关键词：

microcantilever; aluminum nitride; torsional mode; quality factor;

D O I：

暂无

中图分类号：

TP212 [发送器（变换器）、传感器];

学科分类号：

080202 ;

摘要：

A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution.In this paper we systematically investigate the performance of the microcantilever in different resonance modes,which are the first three flexural modes,the first lateral mode,and the first and the second torsional modes.An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere,using a custom-built vacuum chamber.From the experiment results,it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones.Finally,an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results.

引用

页码：485 / 489

页数：5

共 18 条

[1]

Burgdorfer A. J.Basic Eng . 1959

[2]

Green, Christopher P.,Sader, John E.Torsional frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope. Journal of Applied Physics . 2002

[3]

Zhao H,Luo W,Zheng H Y,Yang J L,Yang F H. Chin.Phys.B . 2012

[4]

Blom, F. R.,Bouwstra, S.,Elwenspoek, M.,Fluitman, J. H. J.Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures . 1992

[5]

Xia X,Li X. The Review of Scientific Instruments . 2008

[6]

L. Fadel,F. Lochon,I. Dufour,O. Francais.Chemical Sensing: Millimeter Size Resonant Microcantilever Performance. Journal of Micromechanics and Microengineering . 2004

[7]

Lübbe J,Schnieder H,Reichling M. Proceedings of the 13th International Conference on Non-Contact Atomic Force Microscopy . 2010

[8]

Jin D Z,Li X X,Zhang Z X,Bao H H,Wang Y L,Liu J,Yu H T. Proceedings of the IEEE 20th International Conference on Micro-electro Mechanical Systems . 2007

[9]

Philip S. Waggoner,Harold G. Craighead.Micro- and nanomechanical sensors for environmental, chemical, and biological detection. Lab on a Chip . 2007

[10]

Hao, Zhili,Erbil, Ahmet,Ayazi, Farrokh.An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations. Sensors and Actuators . 2003

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