New development of atmospheric pressure plasma polishing

被引:0
|
作者
王波 [1 ]
张巨帆 [1 ]
董申 [1 ]
机构
[1] Center for Precision Engineering,Harbin Institute of Technology
基金
中国国家自然科学基金;
关键词
New development of atmospheric pressure plasma polishing; SEM;
D O I
暂无
中图分类号
TG664 [高速流体加工设备及其加工];
学科分类号
080201 ;
摘要
Atmospheric pressure plasma polishing (APPP) is a precision machining technology used for manufacturing high quality optical surfaces.The changes of surface modulus and hardness after machining prove the distinct improvement of surface mechanical properties.The demonstrated decrease of surface residual stresses testifies the removal of the former deformation layer.And the surface topographies under atomic force microscope (AFM) and scanning electron microscope (SEM) indicate obvious amelioration of the surface status,showing that the 0.926-nm average surface roughness has been achieved.
引用
收藏
页码:537 / 538
页数:2
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