AN IMPROVED ELECTRON SCATTERING MODEL IN MULTI-LAYER MEDIUM——“EQUIVALENT SINGLE MEDIUM SCATTERING” CALCULATION METHOD

<正> A physical model of ke V electron scattering in multi-layer medium and a Monte Carlo simulation method proposed by the authors have been successfully applied to theoretical calculation on the emission of backscattered electron, X-ray quantitative analysis in multi-layer films and the energy deposition of electron beam exposure.The model is based on the "equal number of steps and variational step length" con-cept. In the model, when an electron comes from one medium into another, the scattering number of the electron in the "new" medium is considered as N-n, where