The Influence of Annealing Temperature on the Structure and Properties of TiO2 Films Prepared by Sputtering

The TiO2 films were prepared on slides by dc reactive magnetron sputtering, then the samples were annealed at 300 ℃,350 ℃,400 ℃,450 ℃,500 ℃ and 550 ℃,respectively. X-ray diffraction （XRD） was used to obtain the TiO2 film crystalline structure; X-ray photoelectron spectroscopy （XPS） was used to study the film surface stoichiometries; surface morphologies were studied by scanning electron microscopy （SEM）; the contact angle was tested to indicate the TiO2 film wettability; and the photocatalytic activity testing was conducted to evaluate the photocatalysis properties. The photocatalytic activity and contact angle testing results were correlated with the crystallinity, surface morphologies and surface ·OH concentration of TiO2 films. The samples with a higher polycrystalline anatase structure, rough surface and high ·OH concentration displayed a better photoinduced hydrophilicity and a stronger photocatalysis.