Growth of Aligned Carbon Nanotubes through Microwave Plasma Chemical Vapor Deposition

被引：0

作者：

王升高

汪建华

马志斌

王传新

满卫东

机构：

[1] China

[2] Hefei 230031

[3] Institute of Plasma Physics Chinese Academy of Science

[4] Province Key Laboratory of Plasma Chemistry & Advanced Materials Wuhan Institute of Chemical Technology

[5] Wuhan 430074

来源：

Plasma Science & Technology | 2005年 / 01期

关键词：

carbon nanotubes; microwave plasma; chemical vapor deposition;

D O I：

暂无

中图分类号：

O613.71 [碳C];

学科分类号：

070301 ; 081704 ;

摘要：

Aligned carbon nanotubes (CNTs) were synthesized on glass by microwave plasma chemical vapor deposition (MWPCVD) with a mixture of methane and hydrogen gases at the low temperature of 550 ℃. The experimental results show that both the self-bias potential and the density of the catalyst particles are responsible for the alignment of CNTs. When the catalyst particle density is high enough, strong interactions among the CNTs can inhibit CNTs from growing randomly and result in parallel alignment.

引用

页码：2681 / 2683

页数：3

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