Pulsed-Laser Annealing of NiTi Shape Memory Alloy Thin Film

被引:0
作者
S.K. Sadrnezhaad [1 ,2 ]
E. Rezvani [1 ]
S. Sanjabi [1 ,3 ]
A.A. Ziaei Moayed [2 ]
机构
[1] Materials and Energy Research Center, P.O. Box 14155-4777, Tehran, Iran
[2] Department of Materials Science and Engineering, Sharif University of Technology, P.O. Box 1156-9466, Tehran, Iran
[3] Department of Materials Science and Engineering, Tarbiat Modarres University, P.O. Box 14115-143, Tehran, Iran
关键词
Local heat treatment; NiTi thin film; Pulsed laser annealing; Amorphous/crystallized spot composite;
D O I
暂无
中图分类号
TG146.23 []; TG146.263 [];
学科分类号
080502 ;
摘要
Local annealing of amorphous NiTi thin films was performed by using an Nd:YAG 1064 nm wavelength pulsed laser beam. Raw samples produced by simultaneous sputter deposition from elemental Ni and Ti targets onto unheated Si (100) and Silica (111) substrates were used for annealing. Delicate treatment with 15.92 W/mm2 power density resulted in crystallization of small spots; while 16.52 and 17.51 W/mm2 power densities caused ablation of the amorphous layer. Optical microscopy, scanning electron microscopy, X-ray diffraction and atomic force microscopy were performed to characterize the microstructure and surface morphology of the amorphous/crystallized spot patterns.
引用
收藏
页码:135 / 140
页数:6
相关论文
共 15 条
[1]  
Q. He,W.M. Huang,M.H. Hong,M.J. Wu,Y.Q. Fu,T.C. Chong,F. Chellet,H.Q. Du. Smart Matter. Struct . 2004
[2]  
Characterization of a nanocrystalline NiTiHf high temperature shape memory alloy thin film. Yunxiang Tong Yong Liu Jianmin Miao and Liancheng Zhao. Scripta Materialia . 2005
[3]  
Crystallization kinetics of amorphous NiTi shape memory alloy thin films. Xi Wang and Joost J. Vlassak. Scripta Materialia . 2006
[4]  
TiNi-based thin films in MEMS applications: a review. Fu,Y.,Du,H.,Huang,W.,Zhang,S.,Hu,M. Sensors and Actuators . 2004
[5]  
Laser annealing of amorphous NiTi shape memory alloy thin films to locally induce shape memory properties. X. Wang Y. Bellouard and J.J. Vlassak. Acta Materialia . 2005
[6]  
Characteristics and fabrication of NiTi/Si diaphragm micropump. D.Xu,,L.Wang,,G.F.Ding,,Y.Zhou,,A.B.Yu,,B.C.Cai. Sensors and Actuators . 2001
[7]  
Laser deposition of shape-memory alloy for MEMS applications. A. Camposeo N. Puccini F. Fuso M. Allegrini E. Arimondo and A. Tuissi. Applied Surface Science . 2003
[8]  
Y. Bellouard,T. Lehnert,J.E. Bidaux,T. Sidler,R. Clavel,R. Gotthard. Materials Science and Engineering . 1999
[9]  
L.L. Stepan,D. Levi,G. Carman. J. Biomechani- cal Eng Transaction of ASME . 2005
[10]  
N.W. Botteril,D.M. Grant. Mater Sci. Eng. A . 2004