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Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Anhui Higher Educ Inst, Key Lab Precis Sci Instrumentat,CAS Key Lab Mech, Hefei 230027, Peoples R China Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Anhui Higher Educ Inst, Key Lab Precis Sci Instrumentat,CAS Key Lab Mech, Hefei 230027, Peoples R China