Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets

被引：1

作者：

Fajun Yang ^{[1
,2
]}

Naiqi Wu ^{[3
,4
,5
]}

Yan Qiao ^{[3
,4
]}

Rong Su ^{[3
,2
]}

机构：

[1] Department of Industrial Engineering, School of Electro-Mechanical Engineering, Guangdong University of Technology

[2] School of Electrical and Electronic Engineering at Nanyang Technological University

[3] IEEE

[4] Institute of Systems Engineering,Macau University of Science and Technology

[5] school of Electro-Mechanical Engineering,Guangdong University of Technology

来源：

IEEE/CAA Journal of Automatica Sinica | 2018年 / 5卷 / 01期

基金：

新加坡国家研究基金会; 中国国家自然科学基金;

关键词：

Multi-cluster tool; Petri nets; scheduling; semiconductor manufacturing;

D O I：

暂无

中图分类号：

TP301.1 [自动机理论];

学科分类号：

081202 ;

摘要：

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer cyclic schedule. It is modeled with Petri nets such that a onewafer cyclic schedule is parameterized as its robots’ waiting time.Based on the model, this work proves the existence of its onewafer cyclic schedule that features with the ease of industrial implementation. Then, computationally efficient algorithms are proposed to find the minimal cycle time and optimal onewafer cyclic schedule. Multi-cluster tool examples are given to illustrate the proposed approach. The use of the found schedules enables industrial multi-cluster tools to operate with their highest productivity.

引用

页码：270 / 280

页数：11

共 4 条

[1] A novel method for deadlock prevention of AMS by using resource-oriented Petri nets[J] . Hefeng Chen,NaiQi Wu,MengChu Zhou. Information Sciences . 2015
[2] Sequencing of parts and robot moves in a robotic cell[J] . S. P. Sethi,C. Sriskandarajah,G. Sorger,J. Blazewicz,W. Kubiak. International Journal of Flexible Manufacturing Systems . 1992 (3)
[3] Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations .2 Chan,Wai Kin Victor,Ding,Shengwei,Yi,Jingang,Song,Dezhen. IEEE Transactions on Automation Science and Engineering . 2011
[4] Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting .2 NaiQi Wu,Feng Chu,Chengbin Chu,Mengchu Zhou. Systems, Man, and Cybernetics: Systems, IEEE Transactions on . 2013

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