Si-Based Materials and Devices

J. Semicond. 2018, Vol. 39, Issue 6With the increase of integration density in ICs which is mainly based on silicon materials, the gate lengths of transistors are now scaled down to 7 nm, leading to fundamental challenges to keep up with the Moore’s law. In recent years, many researchers have tried to use the nano-sized Si structure or introduce groupⅣalloys to address the light source issue and establish all Si-based