Roll-to-roll imprint for high precision grating manufacturing

被引：3
|
作者：
Liu Hongzhong [1 ,2 ]
Shi Yongsheng [1 ,2 ]
Yin Lei [1 ,2 ]
Jiang Weitao [1 ,2 ]
Lu Bingheng [1 ,2 ]
机构：
[1] School of Mechanical Engineering,Xi'an Jiaotong University
[2] State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University
来源：
Engineering Sciences | 2013年 / 11卷 / 01期
基金：
中国国家自然科学基金;
关键词：
high-precision gratings; roll-to-roll imprint; misalignment; roller mold;
D O I：
暂无
中图分类号：
TH744 [物理光学仪器];
学科分类号：
0803 ;
摘要：
In this paper,a novel roll-to-roll imprint process is proposed to fabricate gratings in large area. The key challenges in roll-to-roll imprint process,such as the roller mold preparation,imprint system,misalignment of imprint roller and backup roller,and also the imprint pressure,are investigated. Various gratings with different periods and profiles are obtained by the roll-to-roll process. To calibrate the measuring ability of the self-made grating by imprint,a calibration system is built with a dual-frequency laser interferometer. By the calibration,the self-made gratings can achieve ±4μm accuracy in 45mm measuring distance.
引用
收藏
页码：39 / 43
页数：5
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