Experiment of soft X-ray lithography using a repetitively laser-produced plasma source

被引：0
|
作者：
郭玉彬
机构：
[1] Chinese Academy of Sciences
[2] Changchun 130022
[3] State Key Laboratory of Applied Optics
[4] Changchun Institute of Optics and Fine Mechanics
[5] China
来源：
Chinese Science Bulletin | 1996年 / 24期
关键词：
laser-produced plasma; soft X-ray lithography; resist;
D O I：
暂无
中图分类号：
O434.1 [X射线];
学科分类号：
070207 ; 0803 ;
摘要：
The soft X-ray lithography using a repetitively laser-produced plasma(LPP)source isone of the key techniques and methods for making microdevices and microstructures ofsubmicron and submicron levels in the world.But we have not found relevant reportsdomestically.
引用
收藏
页码：2047 / 2049
页数：3
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