共 5 条
Synthesis of a Large Diamond Crystal with a Smooth(100) Facet at its Top Through MPCVD
被引:0
|作者:
朱金凤
[1
]
满卫东
[1
]
吕继磊
[1
]
涂昕
[1
]
汪建华
[1
]
机构:
[1] Provincial Key Laboratory of Plasma Chemistry and Advanced Materials,Wuhan Institute of Technology
基金:
中国国家自然科学基金;
关键词:
large crystal;
microwave plasma;
chemical vapor deposition;
smooth(100)facet;
D O I:
暂无
中图分类号:
TN304.055 [];
学科分类号:
0805 ;
080501 ;
080502 ;
080903 ;
摘要:
A large diamond crystal up to 500μm in diameter with a smooth(100)facet at its top has been synthesized on Mo substrate through microwave plasma chemical vapor deposition(MPCVD).Its morphology and quality were characterized by scanning electron microscopy(SEM),and the growth mechanism was roughly illustrated from both macroscopic and microscopic viewpoints.It was found that morphological instabilities are a major factor resulting in synthesis of large diamond crystals,moreover,high microwave power density(MPD),high CH4 concentrations,high pressure,high substrate surface temperature and the addition of a small amount of O2 were also necessary for the synthesis of large diamond crystals.
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页码:1144 / 1148
页数:5
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