Study of TiO2 thin films on Si substrate by the photoacoustic elastic bending method

被引：0

作者：

TODOROVI Dragan M ^{[1
]}

RABASOVI Mihailo D ^{[2
]}

MARKUSHEV Dragan D ^{[2
]}

FRANKO Mladen ^{[3
]}

TANGAR Urka Lavreni ^{[3
]}

机构：

[1] Institute for Multidisciplinary Research,University of Belgrade

[2] Institute of Physics,University of Belgrade

[3] Laboratory for Environmental Research,University of Nova Gorica

来源：

Science China(Physics,Mechanics & Astronomy) | 2013年 / Mechanics & Astronomy)2013卷 / 07期

关键词：

photoacoustic; TiO2; thin films;

D O I：

暂无

中图分类号：

O484 [薄膜物理学];

学科分类号：

080501 ; 1406 ;

摘要：

The quantitative photoacoustic investigation of different TiO2 thin films on Si substrates is presented using the elastic bending method. Photoacoustic signal amplitude and phase spectra versus modulation frequency were measured and analyzed using different sample thicknesses. Within the proposed method particular attention is given to the analysis of optical, thermal, elastic and structural sample parameters. Considerable focus is devoted to the fitting procedure of experimental results using the two-layer sample theoretical model. Characteristics of previously developed photoacoustic apparatus are discussed, attempting to search the ideal experimental conditions which can provide a good signal-to-noise ratio and sensitivity.

引用

页码：1285 / 1293

页数：9