Model of Polysilicon Electro-thermal Micro Actuator and Research of Micro Scale Effect

A type of crank beam electro-thermal micro actuator was prescribed. Mechanical model of the actuator was established, and the static characteristic was analyzed.Comparing the theoretical analysis with experimental data, it is found that the thermodynamic character of material in micro actuator has a different variable regularity contrasted to that used in macro scale machines. It is the micro scale effect that results in the deviation between the simulating result and experimental results. The thermodynamic expression of polysilicon, which was fitted by means of the experimental data concerned, was used to modify the mechanical model. The modified model, in which the micro scale thermodynamic characteristic was considered, was more reasonable and could make the optimal design and control strategies analyzing the straight-line micro actuator more feasible.