基于相关拟合校准技术的MEMS平面微运动纳米精度测量

[1] Accuracy and reproducibility of a subpixel extended phase correlation method to determine micron level displacements in the heart. Damon Kelly,Evren U.Azeloglu. Medical Engineening&Physics . 2007

[2] Extension of phase correlation to sub-pixel registration. Foroosh,H,Zerubia,J,Berthod,M. IEEE Transactions on Image Processing . 2002

[3] Nanome-ter resolution of three-dimensional motions using video interference micros-copy. Hemmert W,Mermelstein M S,Freeman D M. IEEE International MEMS99 . 1999

[4] A system for automatic electrical and optical characterization of microelectromechanical devices. BURNS D J,HELBIG H F. Journal of Microbiology . 1999

[5] Analysis of the Dynamics in Microactuators Using High-speed Cine Photomicrography. Rembe,C.,Tibken,B.,Hofer,E. Journal of Microbiology . 2001

[6] Optical measurement methods to study dynamic behavior in MEMS. REMBE C,,KANT R,MULLER R S. Microsystems Engineering:Metrology and Inspection . 2001

[7] Motion esti-mations,egmentation and separation,using hypercomplex phase correlationc,lustering techniques and graph-based optimization. Alexiadis Dimitrios S,Sergiadis George D. Computer Vision and Image Under-standing . 2009

[8] A projection-based extension to phase correlation image alignment. Keller Y,Averbuch A. Signal Process-ing . 2007

[9] Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method. Chen Zhi,,Hu XiaodongJ,in Cuiyun,et al. Sixth Interna-tional Symposium on Instrumentation and Control Tech-nology . 2006

[10] In-plane measurements of microelectromechanical systems vibrations with nanometer resolution using the correlation of synchronous images. B.Serio,J.J.Hunsinger,B.Cretin. The Review of Scientific Instruments . 2004

[1] Accuracy and reproducibility of a subpixel extended phase correlation method to determine micron level displacements in the heart. Damon Kelly,Evren U.Azeloglu. Medical Engineening&Physics . 2007

[2] Extension of phase correlation to sub-pixel registration. Foroosh,H,Zerubia,J,Berthod,M. IEEE Transactions on Image Processing . 2002

[3] Nanome-ter resolution of three-dimensional motions using video interference micros-copy. Hemmert W,Mermelstein M S,Freeman D M. IEEE International MEMS99 . 1999

[4] A system for automatic electrical and optical characterization of microelectromechanical devices. BURNS D J,HELBIG H F. Journal of Microbiology . 1999

[5] Analysis of the Dynamics in Microactuators Using High-speed Cine Photomicrography. Rembe,C.,Tibken,B.,Hofer,E. Journal of Microbiology . 2001

[6] Optical measurement methods to study dynamic behavior in MEMS. REMBE C,,KANT R,MULLER R S. Microsystems Engineering:Metrology and Inspection . 2001

[7] Motion esti-mations,egmentation and separation,using hypercomplex phase correlationc,lustering techniques and graph-based optimization. Alexiadis Dimitrios S,Sergiadis George D. Computer Vision and Image Under-standing . 2009

[8] A projection-based extension to phase correlation image alignment. Keller Y,Averbuch A. Signal Process-ing . 2007

[9] Nanoscale measurement technique of in-plane motion for MEMS based on phase correlation method. Chen Zhi,,Hu XiaodongJ,in Cuiyun,et al. Sixth Interna-tional Symposium on Instrumentation and Control Tech-nology . 2006

[10] In-plane measurements of microelectromechanical systems vibrations with nanometer resolution using the correlation of synchronous images. B.Serio,J.J.Hunsinger,B.Cretin. The Review of Scientific Instruments . 2004