A flexible capacitive tactile sensor array with micro structure for robotic application

被引：0

作者：

HU XiaoHui ^{[1
]}

ZHANG Xu ^{[1
]}

LIU Ming ^{[1
]}

CHEN YuanFang ^{[1
]}

LI Peng ^{[1
]}

PEI WeiHua ^{[1
]}

ZHANG Chun ^{[2
]}

CHEN HongDa ^{[1
]}

机构：

[1] Institute of Semiconductors, Academy of Sciences

[2] Institute of Microelectronics, Tsinghua University

来源：

Science China(Information Sciences) | 2014年 / 57卷 / 12期

关键词：

capacitive sensor; flexible; tactile sensor; micro needle; bionic robot;

D O I：

暂无

中图分类号：

TP242 [机器人];

学科分类号：

1111 ;

摘要：

A flexible capacitive tactile sensor array with micro needle structure is proposed in this paper for robotic application.Micro needle layer made of polydimethylsiloxane(PDMS)is sandwiched between the upper electrode layer made of PDMS and the bottom electrode layer fabricated on polyester(PET)film.The PDMS material renders the device adequate flexibility as it can be rolled into a cylinder.The single cell size in the fabricated 4×4 sensors array is 0.7×0.5 cm2and the initial capacitance of each cell is 0.86 p F.The fabricated cell shows a sensitivity of 3.26%/m N within the full scale range of 1 k Pa.The micro needle structure gives better repeatability and stability.The maximum error during each measurement is about 3.2%,while the minimum error is about 1.2%.

引用

页码：41 / 46

页数：6

共 5 条

[1] Object-shape recognition and 3D reconstruction from tactile sensor images [J].

Khasnobish, Anwesha ;

Singh, Garima ;

Jati, Arindam ;

Konar, Amit ;

Tibarewala, D. N. .

MEDICAL & BIOLOGICAL ENGINEERING & COMPUTING, 2014, 52 (04) :353-362

[2] Screen printing of a capacitive cantilever-based motion sensor on fabric using a novel sacrificial layer process for smart fabric applications [J].

Wei, Yang ;

Torah, Russel ;

Yang, Kai ;

Beeby, Steve ;

Tudor, John .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2013, 24 (07)

[3]

Development of a flexible PDMS capacitive pressure sensor for plantar pressure measurement[J] . Kin Fong Lei,Kun-Fei Lee,Ming-Yih Lee.Microelectronic Engineering . 2012

[4]

An integrated flexible temperature and tactile sensing array using PI-copper films[J] . Y.-J. Yang,M.-Y. Cheng,W.-Y. Chang,L.-C. Tsao,S.-A. Yang,W.-P. Shih,F.-Y. Chang,S.-H. Chang,K.-C. Fan.Sensors & Actuators: A. Physical . 2007 (1)

[5]

Flexible capacitive sensors for high resolution pressure measurement .2 Pritchard E,Mahfouz M,Evans Iii B,et al. Proceedings of IEEE Sensors . 2008

← 1 →