Characterization of La-doped xBiInO3(1-x)PbTiO3 Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method

被引：0
|
作者：
孙科学 [1 ]
张淑仪 [1 ]
Kiyotaka Wasa [1 ,2 ]
水修基 [1 ]
机构：
[1] Laboratory of Modern Acoustics,Institute of Acoustics,Collaborative Innovation Center of Advanced Microstructures,Nanjing University
[2] Graduate School of Yokohama City University
来源：
Chinese Physics Letters | 2016年 / 33卷 / 06期
基金：
中国国家自然科学基金;
关键词：
of; BI; Characterization of La-doped xBiInO3; x)PbTiO3 Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method; in; by; La; PT;
D O I：
暂无
中图分类号：
O484 [薄膜物理学];
学科分类号：
080501 ; 1406 ;
摘要：
La-doped and undoped xBHnO-(1-x)PbTiO(BI-PT) thin films are deposited on(101)SrRuO/(100)Pt/(100)MgO substrates by the rf-magnetron sputtering method.The structures of the films are characterized by XRD and SEM,and the results indicate that the thin films are grown with mainly(100) oriented and columnar structures.The ferroelectricity and piezoelectricity of the BI-PT Ghns are also measured,and the measured results illustrate that both performances are effectively improved by the La-doping with suitable concentrations.These results will open up wide potential applications of the flims in electronic devices.
引用
收藏
页码：53 / 56
页数：4
相关论文
共 50 条
  • [1] Characterization of La-doped xBiInO3(1-x)PbTiO3 Piezoelectric Films Deposited by the Radio-Frequency Magnetron Sputtering Method
    Sun, Ke-Xue
    Zhang, Shu-Yi
    Wasa, Kiyotaka
    Shui, Xiu-Ji
    CHINESE PHYSICS LETTERS, 2016, 33 (06)
  • [2] Optimized properties of xBiInO3- (1-x)PbTiO3 thin films deposited by an RF-magnetron sputtering method
    Sun, Ke-Xue
    Zhang, Shu-Yi
    Wasa, Kiyotaka
    Shui, Xiu-Ji
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2016, 213 (09): : 2479 - 2484
  • [3] High Temperature Piezoelectric Thin Films xBiInO3-(1-x)PbTiO3 Deposited by PLD and Their Properties
    Wang Wei
    Tang Jia-Wei
    Chen Xiao-Bing
    JOURNAL OF INORGANIC MATERIALS, 2014, 29 (05) : 475 - 481
  • [4] Transverse Piezoelectric Properties of xBiInO3-(1-x)PbTiO3 Thin Films
    Sun K.
    Chang Y.
    Cheng X.
    Cailiao Daobao/Materials Reports, 2019, 33 (07): : 2299 - 2304
  • [5] The study of ferroelectric La-doped PbTiO3 thin films prepared by RF magnetron sputtering
    Yang, CT
    Zhang, SR
    Liu, JS
    Wu, MQ
    INTEGRATED FERROELECTRICS, 2003, 52 : 223 - 228
  • [6] Piezoelectric properties of La-doped PbTiO3 films for RF resonators
    Yamada, Akira
    Maeda, Chisako
    Uchikawa, Fusaoki
    Misu, Koichiro
    Honma, Toshihiko
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (9 B): : 5520 - 5523
  • [7] Piezoelectric properties of La-doped PbTiO3 films for RF resonators
    Yamada, A
    Maeda, C
    Uchikawa, F
    Misu, K
    Honma, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (9B): : 5520 - 5523
  • [8] Perovskite xBiInO3-(1-x)PbTiO3 Crystals
    Xu, Lan
    Miao, Juhong
    Xiao, Jingzhong
    Paixao, Jose A.
    Costa, Maria M. R.
    Costa, Benilde
    Hugo, Vitor
    Shi, Fanian
    FERROELECTRICS, 2013, 457 (01) : 39 - 43
  • [9] CHARACTERIZATION OF SILVER FILMS DEPOSITED BY RADIO-FREQUENCY MAGNETRON SPUTTERING
    MARECHAL, N
    QUESNEL, E
    PAULEAU, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (03): : 707 - 713
  • [10] DEPOSITION AND CHARACTERIZATION OF PBTIO3 THIN-FILMS GROWN BY RADIO-FREQUENCY SPUTTERING ON MGO(100)
    KIM, S
    BAIK, S
    THIN SOLID FILMS, 1995, 266 (02) : 205 - 211
12345