Enhanced surface plasmon interference lithography from cavity resonance in the grating slits

被引：0

作者：

郭凯 ^{[1
]}

刘建龙 ^{[1
]}

周可雅 ^{[1
]}

刘树田 ^{[1
]}

机构：

[1] Department of Physics,Harbin Institute of Technology

来源：

Chinese Physics B | 2015年 / 24卷 / 04期

基金：

中国国家自然科学基金;

关键词：

surface plasmons; lithography; cavity resonance;

D O I：

暂无

中图分类号：

TN305.7 [光刻、掩膜];

学科分类号：

1401 ;

摘要：

Surface plasmon interference lithography based on grating diffraction has been studied both theoretically and experimentally in recent years. In this paper, we demonstrate that the cavity resonance in the grating slits can improve the subwavelength interference, not only the intensity but also the uniformity of the pattern. Both the typical lithography structure which merely consists of periodic metallic gratings and the modified structure equipped with a reflection layer are studied. The finite element method has been performed to study the interference pattern. Numerical simulations show that the property of the interference pattern is the optimum when cavity resonance happens. This enhancement can be applied to all the lithography structures which are based on the grating diffraction.

引用

页码：387 / 390

页数：4

共 6 条

[1] Improving lithographic masks with the assistance of indentations[J] . Guo Ying-Nan,Li Xu-Feng,Pan Shi,Wang Qiao,Wang Shuo,Wu Yong-Kuan. Chinese Physics B . 2012 (5)
[2] Research of photolithography technology based on surface plasmon[J] . Li Hai-Hua,Chen Jian,Wang Qing-Kang. Chinese Physics B . 2010 (11)
[3] Enhanced Surface-Plasmon-Polariton Interference for Nanolithography by a Micro-Cylinder-Lens Array
Liang Hui-Min
Wang Jing-Quan
Fan Feng
Qin Ai-Li
Zhang Chun-Yuan
Cheng Hui
[J]. CHINESE PHYSICS LETTERS, 2010, 27 (09)
[4] Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns
Xu, T.
Fang, L.
Ma, J.
Zeng, B.
Liu, Y.
Cui, J.
Wang, C.
Feng, Q.
Luo, X.
[J]. APPLIED PHYSICS B-LASERS AND OPTICS, 2009, 97 (01): : 175 - 179
[5] The physics of light transmission through subwavelength apertures and aperture arrays
Weiner, J.
[J]. REPORTS ON PROGRESS IN PHYSICS, 2009, 72 (06)
[6] Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens .2 Wu,Qiang,Feke,G. D,Grober,Robert D,Ghislain,L. P. Applied Physics Letters . 1999

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