Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature

被引：0

作者：

LIU Baoting aZHOU Yang aZHENG Hongfang bLI Man aGUO Zhe aZHAO Qingxun aand PENG Yingcai c a College of Physics Science and TechnologyHebei UniversityBaoding China b Baoding UniversityBaoding China c College of Electronic and Information EngineeringHebei UniversityBaoding China ^{[71002
,71000
,71002
]}

机构：

来源：

RareMetals | 2011年 / 30卷 / 02期

关键词：

thin films; zinc oxide; magnetron sputtering; oxygen; structural properties; optical properties;

D O I：

暂无

中图分类号：

O484.1 [薄膜的生长、结构和外延];

学科分类号：

080501 ; 1406 ;

摘要：

Zinc oxide (ZnO) thin films were deposited on sapphire (0001) substrates at room temperature by radiofrequency (RF) magnetron sputtering at oxygen gas contents of 0%,25%,50% and 75%,respectively.The influence of oxygen gas content on the structural and optical properties of ZnO thin films was studied by a surface profile measuring system,X-ray diffraction analysis,atomic force microscopy,and UV spectrophotometry.It is found that the size of ZnO crystalline grains increases first and then decreases with the increase of oxygen gas content,and the maximum grain size locates at the 25% oxygen gas content.The crystalline quality and average optical transmittance (>90%) in the visible-light region of the ZnO film prepared at an oxygen gas content of 25% are better than those of ZnO films at the other contents.The obtained results can be attributed to the resputtering by energetic oxygen anions in the growing process.

引用

页码：170 / 174

页数：5

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