Influence of vacuum annealing and irradiation on magnetic properties of Fe-3% Y2O3 films

被引:0
作者
LI Zhengcao
机构
基金
中国国家自然科学基金;
关键词
magnetic films; yttria; magnetron sputtering; annealing; irradiation; magnetic properties;
D O I
暂无
中图分类号
TB43 [薄膜技术];
学科分类号
0805 ;
摘要
Yttria (Y) dispersed ferrum (Fe) films were prepared by a double-target magnetron co-sputtering method. Vacuum annealing and xenon ion irradiation were conducted to investigate the influence on the magnetic and mechanical properties of the films. The crystal grain growth mechanism and second phase precipitation mechanism were conducted simultaneously in the vacuum annealing process. These two effects led to an opposite variation of nano-hardness and coercivity in the films. Xenon ion irradiation played a role in rapid annealing, which also affected the magnetic performance of the yttria dispersed ferrum films.
引用
收藏
页码:453 / 457
页数:5
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