Structural and optical characteristics of ZnO films on LiGaO2 substrate

被引：0

作者：

Huang, Taohua ^{[1
,2
]}

Zhou, Shengming ^{[1
]}

Teng, Hao ^{[1
,2
]}

Lin, Hui ^{[1
,2
]}

Wang, Jun ^{[1
]}

机构：

[1] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

[2] Graduate University, Chinese Academy of Sciences

来源：

Guangxue Xuebao/Acta Optica Sinica | 2008年 / 28卷 / 07期

关键词：

LiGaO[!sub]2[!/sub; Magnetron sputtering; Semiconductor material; Thin film otpics; ZnO films;

D O I：

10.3788/AOS20082807.1420

中图分类号：

学科分类号：

摘要：

ZnO films were fabricated on LiGaO2 (001), (100) and (010) planes by magnetron sputtering. The structural, morphological and optical properties of as-grown ZnO films were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), transmission spectra and photoluminescence (PL) spectra. The results show that ZnO films on various planes of LiGaO2 have different preferred orientations. [0001], [11̄00] and [112̄0] oriented ZnO films are obtained on LiGaO2 (001), (100) and (010) planes, respectively. The ZnO films show different surface morphologies and high transmittance in visible spectrum range. Only UV emission peaks located at 378 nm are observed in PL spectra of ZnO films. The (11̄00) ZnO film shows the highest UV emission intensity with the smallest full width at half maximum (FWHM) value. The difference in PL properties of the ZnO films is mainly due to different grain sizes.

引用

页码：1420 / 1424

页数：4

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