Light-emission Properties Of Europium-doped tantalum-oxide thin films deposited by radio-frequency magnetron sputtering

被引:6
作者
Miura, Kenta [1 ]
Arai, Yuki [1 ]
Osawa, Takumi [1 ]
Hanaizumi, Osamu [1 ]
机构
[1] Department of Electronic Engeneering, Graduate School of Engeneering, Gamma University, Japan
关键词
Annealing - Ultraviolet lasers - Light emission - Europium compounds - Radio waves - Thin films - Magnetron sputtering - Oxide films;
D O I
10.2150/jlve.36.64
中图分类号
学科分类号
摘要
Light-emitting europium-doped tantalum-oxide thin films were prepared by radio-frequency magnetron sputtering. Red photoluminescence was obtained from the films after annealing by ultraviolet-laser excitation. Four peaks having wavelengths of around 600, 620, 650, and 700 nm were observed from films annealed at 600 to 900°C. The strongest intensity of the most remarkable 620-nm peak was obtained from the film annealed at 700°C for 20 min.
引用
收藏
页码:64 / 67
相关论文
empty
未找到相关数据