[1] Hochschule Hannover, Fakultät für Elektro- und Informationstechnik, Ricklinger Stadtweg 120, Hannover,30459, Germany
[2] TU Braunschweig, Institute of Microtechnology, Alte Salzdahlumer Str. 203, Braunschweig,38124, Germany
[3] TU Braunschweig, Institute of Biochemistry, Biotechnology and Bioinformatics, Spielmannstr. 7, Braunschweig,38106, Germany
[4] TU Braunschweig, Center of Pharmaceutical Engineering (PVZ), Franz-Liszt-Straße 35A, Braunschweig,38106, Germany