Multi-wavelength phase-shifting interferometry based on principal component analysis

被引：0

作者：

Fan, Jinping ^{[1
,2
]}

Xu, Xiaofei ^{[1
]}

Zhang, Wanping ^{[1
]}

Lü, Xiaoxu ^{[1
]}

Zhao, Hui ^{[1
]}

Liu, Shengde ^{[1
]}

Zhong, Liyun ^{[1
]}

机构：

[1] Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou, 510006, Guangdong

[2] Department of Electronic Communication Technology, Shenzhen Institute of Information Technology, Shenzhen, 518172, Guangdong

来源：

Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 10期

关键词：

Interferometry; Measurement; Multi-wavelength phase-shifting interferometry; Phase; Phase-shifting technique; Principal component analysis;

D O I：

10.3788/CJL201542.1008004

中图分类号：

学科分类号：

摘要：

A technique combined multi-wavelength phase-shifting interferometry with principal component analysis (PCA) is presented. By using a monochrome CCD to simultaneously capture a sequence of in-line phaseshifting interferograms with random and unknown phase shifts at multiple wavelengths, the wrapped phase information of each wavelength can be constructed through using the PCA algorithm. Then an unambiguous phase of an extended synthetic beat wavelength can be determined by multi-wavelength optical phase unwrapping and noise reduction. Both the numerical simulation and experimental results show the simple optical measurement process, fast computing speed and high resolution of the proposed method. © 2015, Science Press. All right reserved.

引用

页数：10

共 29 条

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