Multi-wavelength phase-shifting interferometry based on principal component analysis

被引：0

作者：

Fan, Jinping ^{[1
,2
]}

Xu, Xiaofei ^{[1
]}

Zhang, Wanping ^{[1
]}

Lü, Xiaoxu ^{[1
]}

Zhao, Hui ^{[1
]}

Liu, Shengde ^{[1
]}

Zhong, Liyun ^{[1
]}

机构：

[1] Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou, 510006, Guangdong

[2] Department of Electronic Communication Technology, Shenzhen Institute of Information Technology, Shenzhen, 518172, Guangdong

来源：

Zhongguo Jiguang/Chinese Journal of Lasers | 2015年 / 42卷 / 10期

关键词：

Interferometry; Measurement; Multi-wavelength phase-shifting interferometry; Phase; Phase-shifting technique; Principal component analysis;

D O I：

10.3788/CJL201542.1008004

中图分类号：

学科分类号：

摘要：

A technique combined multi-wavelength phase-shifting interferometry with principal component analysis (PCA) is presented. By using a monochrome CCD to simultaneously capture a sequence of in-line phaseshifting interferograms with random and unknown phase shifts at multiple wavelengths, the wrapped phase information of each wavelength can be constructed through using the PCA algorithm. Then an unambiguous phase of an extended synthetic beat wavelength can be determined by multi-wavelength optical phase unwrapping and noise reduction. Both the numerical simulation and experimental results show the simple optical measurement process, fast computing speed and high resolution of the proposed method. © 2015, Science Press. All right reserved.

引用

页数：10

共 29 条

[1]

Gass J., Dakoff A., Kim M.K., Phase imaging without 2π ambiguity by multiwavelength digital holography, Opt Lett, 28, 13, pp. 1141-1143, (2003)

[2]

Cheng Y.-Y., Wyant J.C., Two-wavelength phase shifting interferometry, Appl Opt, 23, 24, pp. 4539-4543, (1984)

[3]

Creath K., Step height measurement using two wavelength phase-shifting interferometry, Appl Opt, 26, 14, pp. 2810-2816, (1987)

[4]

Cheng Y.-Y., Wyant J.C., Multiple wavelength phase-shifting interferometry, Appl Opt, 24, 6, pp. 804-807, (1985)

[5]

Decker J.E., Miles J.R., Madej A.A., Et al., Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry-application to absolute long gauge block measurement, Appl Opt, 42, 28, pp. 5670-5678, (2003)

[6]

Zhang S., Phase unwrapping error reduction framework for a multiple-wavelength phase-shifting algorithm, Opt Eng, 48, 10, (2009)

[7]

Wagner C., Osten W., Seebacher S., Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring, Opt Eng, 39, 1, pp. 79-85, (2000)

[8]

Pan W., Zhao X., Measurement of steel ball surface flaw based on dual wavelength interferometry and digital phase detection, Chinese J Lasers, 41, 5, (2014)

[9]

Deng L., Yang Y., Shi B., Et al., Refractive index distribution and surface profile measurement of micro-optics based on dual wavelength digital holography, Acta Optica Sinica, 34, 3, (2014)

[10]

Kou Y., Li E., Di J., Et al., Surface morphology measurement of tiny object based on dual-wavelength holography, Chinese J Lasers, 41, 2, (2014)

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