Online Quality Assurance of Microchannels in Rollto-Roll by Optical Coherence Tomography

被引：0

作者：

Lauri, Janne ^{[1
]}

Liedert, Christina ^{[2
]}

Liedert, Ralph ^{[2
]}

Fabritius, Tapio ^{[1
]}

机构：

[1] Univ Oulu, Optoelect & Measurement Tech Res Unit, Oulu, Finland

[2] VTT Tech Res Ctr Finland, Oulu, Finland

来源：

2020 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE, I2MTC 2020 | 2020年

基金：

芬兰科学院;

关键词：

non-destructive testing; surface topography; online measurement; profilometer; SURFACE-TOPOGRAPHY; INSPECTION;

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

Roll-to-roll (R2R) process is an emerging technology to manufacture printed electronics, microfluidics, biochemical sensors etc. The requirements for high quality and small tolerances at the manufacturing phase are of the essence for such products. To verify the quality and guarantee the high production yield, high speed, non-destructive testing methods are needed. In this paper, optical coherence tomography (OCT) device is used at the R2R-line to measure online hot embossed microchannel structures at speed of 1 m/min, which is typical for the hot embossing process. The channel's width and shape are determined along the web. The applicability of OCT for topography measurements is demonstrated in an actual R2R environment.

引用

页数：5

共 17 条

[11] Chromatic line confocal technology in high-speed 3D surface-imaging applications [J].

Niemela, Karri .

PHOTONIC INSTRUMENTATION ENGINEERING VI, 2019, 10925

[12] Optical coherence tomography for quantitative surface topography [J].

Ortiz, Sergio ;

Siedlecki, Damian ;

Remon, Laura ;

Marcos, Susana .

APPLIED OPTICS, 2009, 48 (35) :6708-6715

[13]

Ourak M, 2018, IEEE INT CONF ROBOT, P3993, DOI 10.1109/ICRA.2018.8463171

[14] Beyond biomedicine: a review of alternative applications and developments for optical coherence tomography [J].

Stifter, D. .

APPLIED PHYSICS B-LASERS AND OPTICS, 2007, 88 (03) :337-357

[15] Fast in-line surface topography metrology enabling stress calculation for solar cell manufacturing for throughput in excess of 2000 wafers per hour [J].

Walecki, W. J. ;

Szondy, F. ;

Hilali, M. M. .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2008, 19 (02)

[16] Correction of geometric and refractive image distortions in optical coherence tomography applying Fermat's principle [J].

Westphal, V ;

Rollins, AM ;

Radhakrishnan, S ;

Izatt, JA .

OPTICS EXPRESS, 2002, 10 (09) :397-404

[17] Surface topography by wavelength scanning interferometry [J].

Yamaguchi, I ;

Yamamoto, A ;

Yano, M .

OPTICAL ENGINEERING, 2000, 39 (01) :40-46

← 1 2 →