DOUBLE-SIDED HEAT DISSIPATION FOR ACOUSTIC RESONATORS BASED ON LITHIUM NIOBATE ON SAPPHIRE

被引：0

作者：

Qian, Fangsheng ^{[1
]}

Ren, Zijun ^{[1
]}

Wei, Wei ^{[1
]}

Xu, Jiashuai ^{[1
]}

Zheng, Junyan ^{[1
]}

Liu, Xingyu ^{[1
]}

Yang, Yansong ^{[1
]}

机构：

[1] Hong Kong Univ Sci & Technol, Hong Kong, Peoples R China

来源：

2025 IEEE 38TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2025年

基金：

中国国家自然科学基金;

关键词：

Acoustic resonator; lithium niobate; heat dissipation; energy confinement; power handling;

D O I：

10.1109/MEMS61431.2025.10918221

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work introduces a pioneering design of a double-sided heat-dissipated acoustic resonator that significantly enhances cooling capabilities, while achieving a high admittance ratio (AR) of 61.9 dB and a large coupling factor (k(t)(2)) of 17.41%, even with mounting a 2.8-mu m-thick heat sink. The proposed devices employ shear horizontal (SH mode) waves on an X-cut lithium niobate (LiNbO3) thin film/Sapphire platform. An optimized thick amorphous silicon layer with near-zero residual stress serves as an additional heat dissipation pathway without compromising acoustic energy confinement. This double-sided heat dissipation design enables the acoustic devices to operate at higher power densities within highly integrated systems

引用

页码：1165 / 1168

页数：4

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