Heterogeneously Integrated III-V/Silicon C-Band Tunable Lasers on 300-mm Silicon Photonic Wafers

被引:0
作者
Su, Guan-Lin [1 ]
Kumar, Ranjeet [1 ]
Huang, Duanni [1 ]
Gold, David [1 ]
Jones, Richard [1 ]
Rong, Haisheng [1 ]
机构
[1] Intel Corp, Santa Clara, CA 95054 USA
关键词
Laser tuning; Measurement by laser beam; Waveguide lasers; Optical switches; Laser modes; Fiber lasers; Optical ring resonators; Laser noise; Optical filters; Silicon photonics; Tunable lasers; semiconductor lasers; silicon photonics; photonic integrated circuits; SEMICONDUCTOR-LASERS;
D O I
10.1109/LPT.2025.3581932
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a heterogeneously integrated III-V/Si tunable laser fabricated on a 300-mm silicon photonics platform, achieving a wide tuning range from 1510 to 1570 nm with a side-mode suppression ratio (SMSR) above 50 dB, a Lorentzian linewidth below 30 kHz, and relative intensity noise less than -150 dBc/Hz. This laser delivers on-chip optical power exceeding 20 mW at 100 mA of bias current with low variability across a wafer. With closed-loop control, the laser frequency stability is maintained within +/- 1 GHz. This tunable laser can be readily integrated with other photonic components, such as wavelength lockers, modulators, and detectors, enabling fully integrated photonic chips for optical communications, sensing, and next-generation computing applications.
引用
收藏
页码:1177 / 1180
页数:4
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