Influence of the Initial Zinc Nanolayers Obtained by Magnetron Sputtering on the Properties of Thin Zinc Oxide Films Synthesized on Their Basis by Thermal Oxidation

被引：0

作者：

Tomaev, V. V. ^{[1
,4
]}

Polishchuk, V. A. ^{[2
]}

Leonov, N. B. ^{[2
,3
]}

机构：

[1] Tech Univ, St Petersburg State Technol Inst, St Petersburg 190013, Russia

[2] Makarov State Univ Maritime & Inland Shipping, St Petersburg 198035, Russia

[3] ITMO Univ, St Petersburg 197101, Russia

[4] St Petersburg State Univ, Inst Chem, St Petersburg 198504, Russia

来源：

GLASS PHYSICS AND CHEMISTRY | 2025年 / 51卷 / 01期

基金：

俄罗斯科学基金会;

关键词：

zinc; zinc oxide; magnetron sputtering; thermal oxidation in air; thin films; crystal lattice parameters; optical band gap; ZNO; MICROSTRUCTURE; NANORODS; GROWTH;

D O I：

10.1134/S1087659624601126

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The morphology, structural features, and optical properties of zinc oxide films of various thicknesses, synthesized by thermal oxidation in an air atmosphere of polycrystalline zinc layers with a thickness of 10, 20, 40, 50, 60, and 80 nm, obtained by magnetron sputtering on glass substrates, are studied. The influence of the thickness of the initial layers and the size of zinc crystals on the characteristics of the crystal structure and properties of the resulting zinc oxide films, as well as the patterns of the approximation of its optical band gap and crystal lattice parameters to the values for bulk zinc oxide (ZnO) crystals with increasing film thickness, are analyzed.

引用

页码：125 / 132

页数：8

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