Interface Engineering for Hysteresis-Free, High-Performance, and Stable a-IGO Thin-Film Transistors

被引:0
作者
Chen, Zijun [1 ]
Huang, Hao [1 ]
He, Han [1 ]
Sun, Shiwei [1 ]
Ye, Boxi [1 ]
Luo, Die [1 ]
Liu, Xingqiang [2 ]
Zou, Xuming [2 ]
Zou, Bingsuo [1 ]
机构
[1] Guangxi Univ, Sch Resources Environm & Mat, State Key Lab Featured Met Mat & Lifecycle Safety, Nanning 530004, Peoples R China
[2] Hunan Univ, Coll Semicond, Coll Integrated Circuits, Changsha 410082, Peoples R China
关键词
Passivation; Thin film transistors; Aluminum oxide; Hysteresis; Performance evaluation; Indium; Semiconductor device measurement; Logic gates; Stress; Sputtering; Amorphous indium gallium oxide (a-IGO); hysteresis; stability; thin-film transistor (TFT); TEMPERATURES; CHANNEL;
D O I
10.1109/TED.2025.3542750
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The instability of oxide thin-film transistors (TFTs) remains a critical concern that demands attention. Herein, interface engineering was employed to enhance the performance of amorphous indium gallium oxide (a-IGO) TFTs. The Al2O3 sandwich-encapsulation a-IGO TFTs demonstrate outstanding electrical characteristics and remarkable stability, evidenced by an average field-effect mobility of 33.1 cm(2)& sdot;V(-1)s(-1), subthreshold swing of 0.19 V/dec, and an on/off ratio of 10(7) across ten devices. Notably, the most astonishing feature lies in its ability to achieve an exceptionally low hysteresis of merely 0.04 V. Besides, after enduring 3600 s of positive bias stress (PBS) (+2 V) and negative bias stress (NBS) (-2 V), the threshold voltage shifts by insignificant amounts of 0.1 and 0.08 V, respectively. Moreover, the device's longevity in ambient conditions is noteworthy, as evidenced by a mere 1.2% decrease in mobility after 60 days of exposure, highlighting its exceptional environmental stability. Those enhancements in device performance can be attributed to the defect self-compensation effect, which leads to the reduction of a-IGO thin-film defects in sandwich-structured devices. The results indicate that the sandwich-encapsulated IGO TFTs emerge as a highly promising candidate for the next-generation display industry.
引用
收藏
页码:2360 / 2364
页数:5
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