In this study, carbonitride and nitride coating films were deposited on a cemented carbide ISO K10 using two different (Al, Cr, W, Si)-targets, namely the (Al53, Cr23, W14, Si10)- and (Al58, Cr24.8, W7.2, Si10)-target. In deposition, N-2 gas or (N-2, CH4) gas was used as the reaction gas, and the substrate DC bias voltage was -150 or -300V. Then the characteristics of the four types of coating films were investigated. ASTM D2 hardened steel was cut with four types of coated cemented carbide tools. The tool wear of the coated tools was experimentally investigated and the following results were obtained: (1) Compared with the wear progress of the (Al58, Cr24.8, W7.2, Si10)N coated tool and that of the (Al58, Cr24.8, W7.2, Si10)(C, N) coated tool, the wear progress of the (Al58, Cr24.8, W7.2, Si10)N coated tool was slightly slower than that of the (Al58, Cr24.8, W7.2, Si10)(C, N) coated tool. ( 2) In the case of the (Al58, Cr24.8, W7.2, Si10)N coated tools, comparing the two types of the substrate DC bias voltages, the wear progress at the substrate DC bias voltage of -300 V was slower. (3) In the case of the substrate DC bias voltage of the - 300V, comparing the wear progress with the (Al53, Cr23, W14, Si10)N coated tool and the (Al58, Cr24.8, W7.2, Si10)N coated tool, the wear progress of the (Al58, Cr24.8, W7.2, Si10)N coated tool was slower. Therefore, as a target material, the (Al58, Cr24.8, W7.2, Si10)-target has excellent wear resistance.