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Effect of inner crucible structure on oxygen transport and distribution in the continuous-feeding Czochralski growth of silicon crystal
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Li, Dengnian
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China

Wang, Changzhen
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China

Qi, Chao
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China

Li, Jiancheng
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China

Zhong, Zeqi
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China

Yang, Yao
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China

Li, Zaoyang
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China

Liu, Lijun
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China
机构:
[1] Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China
关键词:
A1. Mass transfer;
A1. Oxygen impurities;
A1. Computer simulation;
A2. Single crystal growth;
A2. Double crucible technique;
LITHIUM-NIOBATE;
MELT;
INGOTS;
D O I:
10.1016/j.jcrysgro.2025.128278
中图分类号:
O7 [晶体学];
学科分类号:
0702 ;
070205 ;
0703 ;
080501 ;
摘要:
Oxygen is one of the critical impurities in silicon crystal. Excessive oxygen leads to increased defects and reduced efficiency of solar cells. Therefore, reducing oxygen concentration is a key issue in silicon crystal. In this study, a global 2D model for the continuous-feeding Czochralski silicon crystal growth was established, considering the complex shapes of the corner and bottom of inner crucible, instead of using the simplification of cylindrical partition. Based on the model, numerical simulations were performed to investigate the effects of inner crucible diameter, corner shape, and bottom shape on flow, heat transfer and oxygen transport. The results indicate that the structure of inner crucible significantly affects the oxygen transport. With the decrease of inner crucible diameter, the oxygen at crystallization interface increases; with the increase of curvature radius of inner crucible corner, the oxygen at crystallization interface decreases; with the increase of curvature radius of inner crucible bottom, the oxygen at crystallization interface increases. The findings can provide guidance for the optimization of inner crucible structure for reducing oxygen concentration.
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[1]
NUMERICAL AND EXPERIMENTAL-STUDY OF A SOLID PELLET FEED CONTINUOUS CZOCHRALSKI GROWTH-PROCESS FOR SILICON SINGLE-CRYSTALS
[J].
ANSELMO, A
;
PRASAD, V
;
KOZIOL, J
;
GUPTA, KP
.
JOURNAL OF CRYSTAL GROWTH,
1993, 131 (1-2)
:247-264

ANSELMO, A
论文数: 0 引用数: 0
h-index: 0
机构: SUNY,DEPT MECH ENGN,STONY BROOK,NY 11794

PRASAD, V
论文数: 0 引用数: 0
h-index: 0
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KOZIOL, J
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h-index: 0
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GUPTA, KP
论文数: 0 引用数: 0
h-index: 0
机构: SUNY,DEPT MECH ENGN,STONY BROOK,NY 11794
[2]
Engineering insights into heater design for oxygen reduction in CZ silicon growth
[J].
Dezfoli, Amir Reza Ansari
.
CASE STUDIES IN THERMAL ENGINEERING,
2025, 65

Dezfoli, Amir Reza Ansari
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chin Yi Univ Technol, Dept Intelligent Automat Engn, Taichung, Taiwan
Natl Chin Yi Univ Technol, Program Grad Inst Precis Mfg, Taichung, Taiwan Natl Chin Yi Univ Technol, Dept Intelligent Automat Engn, Taichung, Taiwan
[3]
Adjustment of oxygen transport phenomena for Czochralski silicon crystal growth
[J].
Dezfoli, Amir Reza Ansari
;
Adabavazeh, Zary
.
HELIYON,
2024, 10 (08)

Dezfoli, Amir Reza Ansari
论文数: 0 引用数: 0
h-index: 0
机构:
Natl Chin Yi Univ Technol, Dept Intelligent Automat Engn, Taichung, Taiwan Natl Chin Yi Univ Technol, Dept Intelligent Automat Engn, Taichung, Taiwan

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h-index: 0
机构:
Natl Chin Yi Univ Technol, Dept Intelligent Automat Engn, Taichung, Taiwan Natl Chin Yi Univ Technol, Dept Intelligent Automat Engn, Taichung, Taiwan
[4]
Enhancement of heat transfer in Czochralski growth of silicon crystals with a chemical cooling technique
[J].
Ding, Junling
;
Liu, Lijun
;
Zhao, Wenhan
.
JOURNAL OF CRYSTAL GROWTH,
2017, 468
:894-898

Ding, Junling
论文数: 0 引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Sch Energy & Power Engn, Minist Educ, Key Lab Thermofluid Sci & Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Minist Educ, Key Lab Thermofluid Sci & Engn, Xian 710049, Shaanxi, Peoples R China

Liu, Lijun
论文数: 0 引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Sch Energy & Power Engn, Minist Educ, Key Lab Thermofluid Sci & Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Minist Educ, Key Lab Thermofluid Sci & Engn, Xian 710049, Shaanxi, Peoples R China

Zhao, Wenhan
论文数: 0 引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Sch Energy & Power Engn, Minist Educ, Key Lab Thermofluid Sci & Engn, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Minist Educ, Key Lab Thermofluid Sci & Engn, Xian 710049, Shaanxi, Peoples R China
[5]
Fast Pulling of n-Type Si Ingots for Enhanced Si Solar Cell Production
[J].
Kim, Kwanghun
;
Park, Sanghyun
;
Park, Jaechang
;
Pang, Ilsun
;
Ryu, Sangwoo
;
Oh, Jihun
.
ELECTRONIC MATERIALS LETTERS,
2018, 14 (04)
:461-466

Kim, Kwanghun
论文数: 0 引用数: 0
h-index: 0
机构:
Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea

Park, Sanghyun
论文数: 0 引用数: 0
h-index: 0
机构:
Korea Adv Inst Sci & Technol, Grad Sch Energy Environm Water & Sustainabil EEWS, Daejeon 34141, South Korea Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea

Park, Jaechang
论文数: 0 引用数: 0
h-index: 0
机构:
Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea

Pang, Ilsun
论文数: 0 引用数: 0
h-index: 0
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Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea

Ryu, Sangwoo
论文数: 0 引用数: 0
h-index: 0
机构:
Korea Adv Inst Sci & Technol, Grad Sch Energy Environm Water & Sustainabil EEWS, Daejeon 34141, South Korea Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea

Oh, Jihun
论文数: 0 引用数: 0
h-index: 0
机构:
Korea Adv Inst Sci & Technol, Grad Sch Energy Environm Water & Sustainabil EEWS, Daejeon 34141, South Korea
Korea Adv Inst Sci & Technol, Inst NanoCentury, Daejeon 34141, South Korea Woongjin Energy, R&D Ctr, R&D Team, Daejeon 34012, South Korea
[6]
Numerical analysis of continuous charge of lithium niobate in a double-crucible Czochralski system using the accelerated crucible rotation technique
[J].
Kitashima, T
;
Liu, LJ
;
Kitamura, K
;
Kakimoto, K
.
JOURNAL OF CRYSTAL GROWTH,
2004, 266 (1-3)
:109-116

Kitashima, T
论文数: 0 引用数: 0
h-index: 0
机构: Kyushu Univ, Res Inst Appl Mech, Kasuga, Fukuoka 8168580, Japan

Liu, LJ
论文数: 0 引用数: 0
h-index: 0
机构: Kyushu Univ, Res Inst Appl Mech, Kasuga, Fukuoka 8168580, Japan

Kitamura, K
论文数: 0 引用数: 0
h-index: 0
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Kakimoto, K
论文数: 0 引用数: 0
h-index: 0
机构: Kyushu Univ, Res Inst Appl Mech, Kasuga, Fukuoka 8168580, Japan
[7]
Effects of shape of an inner crucible on convection of lithium niobate melt in a double-crucible Czochralski process using the accelerated crucible rotation technique
[J].
Kitashima, T
;
Liu, LJ
;
Kitamura, K
;
Kakimoto, K
.
JOURNAL OF CRYSTAL GROWTH,
2004, 267 (3-4)
:574-582

Kitashima, T
论文数: 0 引用数: 0
h-index: 0
机构: Kyushu Univ, Res Inst Appl Mech, Kasuga, Fukuoka 8168580, Japan

Liu, LJ
论文数: 0 引用数: 0
h-index: 0
机构: Kyushu Univ, Res Inst Appl Mech, Kasuga, Fukuoka 8168580, Japan

Kitamura, K
论文数: 0 引用数: 0
h-index: 0
机构: Kyushu Univ, Res Inst Appl Mech, Kasuga, Fukuoka 8168580, Japan

Kakimoto, K
论文数: 0 引用数: 0
h-index: 0
机构: Kyushu Univ, Res Inst Appl Mech, Kasuga, Fukuoka 8168580, Japan
[8]
Influence of Inner Crucible Radius Variation on the Thermal Field and Oxygen Transport in the Melt During the Growth of Silicon by Continuous Czochralski Method
[J].
Li, Jiacheng
;
Lv, Xuekang
;
Hu, Rongrong
;
Ali, Salamat
;
Li, Gengjin
;
Qi, Jing
;
He, Deyan
.
SILICON,
2025, 17 (01)
:51-62

Li, Jiacheng
论文数: 0 引用数: 0
h-index: 0
机构:
Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China

Lv, Xuekang
论文数: 0 引用数: 0
h-index: 0
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Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China

Hu, Rongrong
论文数: 0 引用数: 0
h-index: 0
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Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China

论文数: 引用数:
h-index:
机构:

Li, Gengjin
论文数: 0 引用数: 0
h-index: 0
机构:
Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China

Qi, Jing
论文数: 0 引用数: 0
h-index: 0
机构:
Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China

He, Deyan
论文数: 0 引用数: 0
h-index: 0
机构:
Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China Lanzhou Univ, Sch Mat & Energy, Lanzhou 730000, Peoples R China
[9]
A novel approach to reduce the oxygen content in monocrystalline silicon by Czochralski method
[J].
Li, Jiancheng
;
Wang, Junlei
;
Liu, Lijun
;
Wen, Yong
;
Wang, Changzhen
.
JOURNAL OF CRYSTAL GROWTH,
2024, 630

Li, Jiancheng
论文数: 0 引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China

Wang, Junlei
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China
Baotou Meike Silicon Energy Co Ltd, Baotou 014015, Inner Mongolia, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China

Liu, Lijun
论文数: 0 引用数: 0
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China

Wen, Yong
论文数: 0 引用数: 0
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Baotou Meike Silicon Energy Co Ltd, Baotou 014015, Inner Mongolia, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China

Wang, Changzhen
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China
[10]
Effects of melt depth on oxygen transport in silicon crystal growth by continuous-feeding Czochralski method
[J].
Li, Jiancheng
;
Li, Zaoyang
;
Liu, Lijun
;
Wang, Changzhen
;
Jin, Yuqi
.
JOURNAL OF CRYSTAL GROWTH,
2023, 610

Li, Jiancheng
论文数: 0 引用数: 0
h-index: 0
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China

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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China

Liu, Lijun
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Wang, Changzhen
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h-index: 0
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China

Jin, Yuqi
论文数: 0 引用数: 0
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Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China Xi An Jiao Tong Univ, Sch Energy & Power Engn, Key Lab Thermo Fluid Sci & Engn, Minist Educ, Xian 710049, Shaanxi, Peoples R China