Advances in Enhancing Energy Deposition Efficiency and Lifetime of Electron-Beam Pumped Excimer Lasers

Electron beam-pumped excimer lasers are capable of achieving high-power laser output in the extreme ultraviolet (EUV) wavelength range, with the advantage of a broad laser wavelength bandwidth and excellent beam uniformity, making them highly competitive candidate drivers for Inertial Confinement Fusion (ICF). Enhancing the energy deposition efficiency and lifetime of electron beam-pumped excimer lasers is of paramount importance for their application in ICF. This paper analyzes strategies to improve the energy deposition efficiency and lifespan of these lasers from two perspectives: pulsed power drivers and electron beam diodes. It summarizes the research advancements in this field and provides an overview of future research content and methodologies. The study presented herein aims to offer insights and guidance for the design of efficient and highly reliable electron beam-pumped excimer lasers.