Atomic Layer Deposition of Nickel Oxides as Electrocatalyst for Oxygen Evolution Reaction

被引：1

作者：

Chen, Jueyu ^{[1
]}

Dai, Ruijie ^{[1
]}

Ma, Hongwei ^{[1
]}

Lin, Zhijie ^{[1
]}

Li, Yuanchao ^{[1
]}

Xi, Bin ^{[1
]}

机构：

[1] Sun Yat Sen Univ, Sch Mat Sci & Engn, Key Lab Polymer Composite & Funct Mat, Minist Educ, Guangzhou 510006, Peoples R China

来源：

NANOMATERIALS | 2025年 / 15卷 / 07期

关键词：

atomic layer deposition; nickel oxides; oxygen evolution reaction; nanocatalyst; WATER OXIDATION; THIN-FILMS; METAL; EFFICIENT; NIO; NANOPARTICLES; CATALYSTS;

D O I：

10.3390/nano15070474

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

In this study, we present atomic layer deposition (ALD) of nickel oxides (NiOx) using a new nickel precursor, (methylcyclopentadienyl)(cyclopentadienyl)nickel (NiCp(MeCp)), and ozone (O3) as the oxygen source. The process features a relatively short saturation pulse of the precursor (NiCp(MeCp)) and a broad temperature window (150-250 degrees C) with a consistent growth rate of 0.39 & Aring; per cycle. The NiOx film deposited at 250 degrees C primarily exhibits a polycrystalline cubic phase with minimal carbon contamination. Notably, the post-annealed ALD NiOx film demonstrates attractive electrocatalytic performance on the oxygen evolution reaction (OER) by providing a low overpotential of 320 mV at 10 mA cm-2, a low Tafel slope of 70.5 mV dec-1, and sufficient catalytic stability. These results highlight the potential of the ALD process using the NiCp(MeCp) precursor for the fabrication of high-activity catalysts.

引用

页数：12

共 57 条

[1] Cost-Effective Alkaline Water Electrolysis Based on Nitrogen- and Phosphorus-Doped Self-Supportive Electrocatalysts [J].

Balogun, Muhammad-Sadeeq ;

Qiu, Weitao ;

Huang, Yongchao ;

Yang, Hao ;

Xu, Ruimei ;

Zhao, Wenxia ;

Li, Gao-Ren ;

Ji, Hongbing ;

Tong, Yexiang .

ADVANCED MATERIALS, 2017, 29 (34)

[2] Engineering a three-dimensional, photoelectrochemically active p-NiO/i-Sb2S3 junction by atomic layer deposition [J].

Barr, Maissa K. S. ;

Assaud, Loic ;

Wu, Yanlin ;

Laffon, Carine ;

Parent, Philippe ;

Bachmann, Julien ;

Santinacci, Lionel .

ELECTROCHIMICA ACTA, 2015, 179 :504-511

[3] Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Cr, Mn, Fe, Co and Ni [J].

Biesinger, Mark C. ;

Payne, Brad P. ;

Grosvenor, Andrew P. ;

Lau, Leo W. M. ;

Gerson, Andrea R. ;

Smart, Roger St. C. .

APPLIED SURFACE SCIENCE, 2011, 257 (07) :2717-2730

[4] X-ray photoelectron spectroscopic chemical state quantification of mixed nickel metal, oxide and hydroxide systems [J].

Biesinger, Mark C. ;

Payne, Brad P. ;

Lau, Leo W. M. ;

Gerson, Andrea ;

Smart, Roger St. C. .

SURFACE AND INTERFACE ANALYSIS, 2009, 41 (04) :324-332

[5] Self-supported ultra-active NiO-based electrocatalysts for the oxygen evolution reaction by solution combustion [J].

Bucci, Alberto ;

Garcia-Tecedor, Miguel ;

Corby, Sacha ;

Rao, Reshma R. ;

Martin-Diaconescu, Vlad ;

Oropeza, Freddy E. ;

de la Pena O'Shea, Victor A. ;

Durrant, James R. ;

Gimenez, Sixto ;

Lloret-Fillol, Julio .

JOURNAL OF MATERIALS CHEMISTRY A, 2021, 9 (21) :12700-12710

[6] Review Article: Catalysts design and synthesis via selective atomic layer deposition [J].

Cao, Kun ;

Cai, Jiaming ;

Liu, Xiao ;

Chen, Rong .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2018, 36 (01)

[7] Atomic layer deposition of nickel by the reduction of preformed nickel oxide [J].

Chae, J ;

Park, HS ;

Kang, SW .

ELECTROCHEMICAL AND SOLID STATE LETTERS, 2002, 5 (06) :C64-C66

[8] N-doped graphene film-confined nickel nanoparticles as a highly efficient three-dimensional oxygen evolution electrocatalyst [J].

Chen, Sheng ;

Duan, Jingjing ;

Ran, Jingrun ;

Jaroniec, Mietek ;

Qiao, Shi Zhang .

ENERGY & ENVIRONMENTAL SCIENCE, 2013, 6 (12) :3693-3699

[9] Microscopic mechanism for unipolar resistive switching behaviour of nickel oxides [J].

Chen, Y. S. ;

Kang, J. F. ;

Chen, B. ;

Gao, B. ;

Liu, L. F. ;

Liu, X. Y. ;

Wang, Y. Y. ;

Wu, L. ;

Yu, H. Y. ;

Wang, J. Y. ;

Chen, Q. ;

Wang, E. G. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2012, 45 (06)

[10] Mechanism of Water Oxidation by Single-Site Ruthenium Complex Catalysts [J].

Concepcion, Javier J. ;

Tsai, Ming-Kang ;

Muckerman, James T. ;

Meyer, Thomas J. .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2010, 132 (05) :1545-1557

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