Study of Trap Influence on Threshold Voltage of SiC MOSFET Based on Transient Current Method

被引:0
作者
Liu, Zhuoming [1 ]
Wen, Qian [1 ]
Meng, Xianwei [1 ]
Pan, Shijie [1 ]
Guo, Chunsheng [1 ]
Feng, Shiwei [1 ]
Zhang, Yamin [1 ]
Zhang, Meng [1 ]
机构
[1] Beijing Univ Technol, Beijing 100124, Peoples R China
基金
北京市自然科学基金; 中国国家自然科学基金;
关键词
Logic gates; Threshold voltage; Electron traps; Stress; Silicon carbide; Transient analysis; Voltage measurement; Semiconductor device measurement; Interface states; Current measurement; SiC MOSFET; threshold voltage shift; trap characteristics; transient current method;
D O I
10.1109/TDMR.2025.3569318
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The threshold voltage shift issue caused by traps in silicon carbide metal-oxide-semiconductor field-effect transistors (SiC MOSFETs) is studied based on transient current method. Experiment results show gate stress, drain stress, and temperature all contribute to threshold voltage shift, with the underlying cause of traps. To obtain physical characteristics of the traps, we test the drain current of the device after filling the traps and utilize a Bayesian iterative deconvolution algorithm to extract the time constants. To accurately explore the impact of traps on the current, we further process the time constant spectrum into a differential amplitude spectrum (DAS), which provides greater precision in addressing the issue of trap amplitudes. We also analyze the variation of trap time constants at different environmental temperatures, and extract the activation energies of the traps in conjunction with the Arrhenius equation. Ultimately, experiments discover two types of electron traps and hole traps.
引用
收藏
页码:323 / 328
页数:6
相关论文
共 25 条
[1]   Distribution of trap energy level in AlGaN/GaN high-electron-mobility transistors on Si under ON-state stress [J].
Anand, Mulagumoottil Jesudas ;
Ng, Geok Ing ;
Arulkumaran, Subramaniam ;
Syamal, Binit ;
Zhou, Xing .
APPLIED PHYSICS EXPRESS, 2015, 8 (10)
[2]   Comparison of Commercial Planar and Trench SiC MOSFETs by Electrical Characterization of Performance-Degrading Near-Interface Traps [J].
Chaturvedi, Mayank ;
Dimitrijev, Sima ;
Haasmann, Daniel ;
Moghadam, Hamid Amini ;
Pande, Peyush ;
Jadli, Utkarsh .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2022, 69 (11) :6225-6230
[3]   Investigation of Threshold Voltage Instability of SiC MOSFETs Under Different Gate Voltage Sequences [J].
Chen, Yuan ;
Rao, Yunliang ;
Wang, Mei ;
Gao, Rui ;
He, Zhiyuan ;
Chen, Yiqiang ;
Lai, Ping .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2024, 71 (04) :2536-2542
[4]   SiC power-switching devices - The second electronics revolution? [J].
Cooper, JA ;
Agarwal, A .
PROCEEDINGS OF THE IEEE, 2002, 90 (06) :956-968
[5]   A Parametric Technique for Trap Characterization in AlGaN/GaN HEMTs [J].
Duffy, S. J. ;
Benbakhti, B. ;
Zhang, W. ;
Ahmeda, K. ;
Kalna, K. ;
Boucherta, M. ;
Mattalah, M. ;
Chahdi, H. O. ;
Bourzgui, N. E. ;
Soltani, A. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2020, 67 (05) :1924-1930
[6]   Study of the Influence of Different Gate Oxide Traps on Threshold Voltage Drift of SiC MOSFET Based on Transient Current [J].
Guo, Chunsheng ;
Cui, Shaoxiong ;
Li, Yumeng ;
Yao, Bojun ;
Zhang, Yamin ;
Zhu, Hui ;
Zhang, Meng ;
Feng, Shiwei .
IEEE TRANSACTIONS ON POWER ELECTRONICS, 2024, 39 (08) :9629-9637
[7]   Towards a Robust Approach to Threshold Voltage Characterization and High Temperature Gate Bias Qualification [J].
Habersat, Daniel B. ;
Lelis, Aivars J. ;
Green, Ronald .
2020 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS), 2020,
[8]   Impact of Different Gate Biases on Irradiation and Annealing Responses of SiC MOSFETs [J].
Hu, Dongqing ;
Zhang, Jingwei ;
Jia, Yunpeng ;
Wu, Yu ;
Peng, Ling ;
Tang, Yun .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2018, 65 (09) :3719-3724
[9]   Trap Characterization of Trench-Gate SiC MOSFETs Based on Transient Drain Current [J].
Jiang, Shan ;
Zhang, Meng ;
Meng, Xianwei ;
Zheng, Xiang ;
Feng, Shiwei ;
Zhang, Yamin .
IEEE TRANSACTIONS ON POWER ELECTRONICS, 2023, 38 (05) :6555-6565
[10]   A Current-Transient Methodology for Trap Analysis for GaN High Electron Mobility Transistors [J].
Joh, Jungwoo ;
del Alamo, Jesus A. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (01) :132-140