Data-driven control in atomic force microscopy using a genetic algorithm

被引：0

作者：

Asmari, Navid ^{[1
]}

Neuner, Lukas ^{[2
]}

Weiss, Richard ^{[2
]}

Mazloumian, Amin ^{[2
]}

Rosenthal, Matthias ^{[2
]}

Karimi, Alireza ^{[1
]}

Fantner, Georg Ernest ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland

[2] Zurich Univ Appl Sci, CH-8401 Winterthur, Switzerland

来源：

ULTRAMICROSCOPY | 2025年 / 275卷

关键词：

Data-driven control; Atomic force microscope; Genetic algorithm; High-speed AFM; HIGH-SPEED; FEEDBACK; DESIGN; AFM;

D O I：

10.1016/j.ultramic.2025.114156

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Increasing the scanning speed in Atomic Force Microscopy (AFM) relies on improving the tracking performance in the vertical direction of motion. The lightly damped resonances of piezo-actuators utilized in AFM nano-positioning stages hinder the maximum achievable bandwidth in tracking sample topographies. A high-order linear controller is proposed as solution. This controller is placed in series with the conventional proportional-integral (PI) controller in AFM to cancel the resonances and push the bandwidth limits to higher values. An optimization problem is formed based on the frequency response of the actuator and the desired performance characteristics for the system. The controller is shaped by solving this problem with a genetic algorithm. Implementing the proposed controller on several AFM scanners shows its effectiveness in improving the tracking bandwidth and hence, increasing the achievable scan speed.

引用

页数：6

共 25 条

[1] Semi-automatic tuning of PID gains for Atomic Force Microscopes [J].

Abramovitch, Daniel Y. ;

Hoen, Storrs ;

Workman, Richard .

2008 AMERICAN CONTROL CONFERENCE, VOLS 1-12, 2008, :2684-2689

[2] Atomic force microscopy using an integrated comb-shape electrostatic actuator for high-speed feedback motion [J].

Akiyama, T ;

Staufer, U ;

de Rooij, NF .

APPLIED PHYSICS LETTERS, 2000, 76 (21) :3139-3141

[3] A high-speed atomic force microscope for studying biological macromolecules [J].

Ando, T ;

Kodera, N ;

Takai, E ;

Maruyama, D ;

Saito, K ;

Toda, A .

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2001, 98 (22) :12468-12472

[4] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[5] Multi-actuation and PI control: A simple recipe for high-speed and large-range atomic force microscopy [J].

Bozchalooi, I. Soltani ;

Youcef-Toumi, K. .

ULTRAMICROSCOPY, 2014, 146 :117-124

[6]

Bozchalooi IS, 2012, P AMER CONTR CONF, P3797

[7] Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application [J].

Croft, D ;

Shed, G ;

Devasia, S .

JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 2001, 123 (01) :35-43

[8]

Fleming AJ, 2014, ADV IND CONTROL, P1, DOI 10.1007/978-3-319-06617-2

[9] Imaging and manipulation of biological structures with the AFM [J].

Fotiadis, D ;

Scheuring, S ;

Müller, SA ;

Engel, A ;

Müller, DJ .

MICRON, 2002, 33 (04) :385-397

[10] Megahertz silicon atomic force microscopy (AFM) cantilever and high-speed readout in AFM-based recording [J].

Hosaka, S ;

Etoh, K ;

Kikukawa, A ;

Koyanagi, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01) :94-99

← 1 2 3 →