A Single-Layer Nested-Coil On-Chip Transformer for Cost-Effective High-Voltage Digital Isolation

被引:0
作者
Zhang, Jinyu [1 ]
Chen, Jixiang [1 ]
Xue, Song [1 ]
Wang, Yihao [1 ]
Wu, Rongxiang [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Device, Chengdu 611731, Peoples R China
基金
中国国家自然科学基金;
关键词
Coils; Diffusion tensor imaging; Transformers; Substrates; Metals; System-on-chip; High-voltage techniques; Fabrication; Lithography; Isolators; Isolation technology; on-chip transformers; digital isolators; THIN-FILM MICROTRANSFORMER; GATE DRIVER;
D O I
10.1109/LED.2025.3546922
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this letter, a single-layer nested-coil on-chip transformer (NCOCT) is proposed and demonstrated for cost-effective high-voltage digital isolation. The two nested planar spiral coils are implemented in a single metal layer for cost-effective fabrication. The metal layer is sandwiched between two isolation layers which block the breakdown paths. The intrinsic distance through isolation (DTI) is determined by the lateral layout distance between the two coils, which makes it easy to achieve high-voltage isolation. The fabricated 0.64-mm(2) NCOCT achieved coil inductances of 28/27 nH, as well as a high isolation capability of 12 kV DC and 8 kVrms AC with a DTI of 37.2 mu m. The small coupling factor of 0.3 and the small primary-to-secondary parasitic capacitance of 0.35 pF provides a similar signal-to-common-mode-transient-noise ratio compared with conventional transformer structures.
引用
收藏
页码:809 / 812
页数:4
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