Nanoarchitectonics of high-temperature langasite SAW CO2 gas sensor using ZnO thin filmNanoarchitectonics of high-temperature langasite SAW CO2 gas sensor using ZnO thin filmA. K. Nagmani and B. Behera

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作者
Aditya Kumar Nagmani [1 ]
Basudeba Behera [1 ]
机构
[1] National Institute of Technology Jamshedpur,Department of Electronics and Communication Engineering
关键词
Surface Acoustic Wave Device; Gas Sensor; Langasite; ZnO thin film; Film Conductivity based gas sensor;
D O I
10.1007/s00339-025-08636-2
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学科分类号
摘要
In this paper, a multilayer surface acoustic wave (SAW) device is developed to sense carbon dioxide (CO2) gas concentrations at elevated temperatures. The proposed SAW sensor consists of a ZnO thin film on a Y-cut x-propagated Langasite (LGS) with Euler angle (0°, 138°.5, 26.6°) substrate. A spacer layer of SiO2 film is used between ZnO and LGS substrate for temperature compensation. The ZnO sensing film is inspected towards the maximum coupling factor (K2), the most considerable SAW velocity change, by varying the thicknesses of the film. A 150 nm thickness of ZnO film is optimised with a maximum K2 of 0.52%. The conductivity of the ZnO film is investigated towards the most considerable SAW velocity change, and a conductivity base sensing range is optimised. The operating temperature of 600 °C is optimised for maximum sensitivity towards the effect of operating temperatures. The sensitivity of the multilayer ZnO/SiO2/LGS device is linear, with the CO2 concentrations in the range of 5000 ppm to 25000 ppm. A maximum sensitivity of 2.65 × 10–6 is obtained for 25000 CO2 concentration.
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