Long indirectly heated cathode ion source with multi-slit electrodes for material modification process

被引：0

作者：

Kai, Hiroaki ^{[1
]}

Igarashi, Yoshiro ^{[1
]}

Takashima, Daiki ^{[1
]}

Matsumoto, Takeshi ^{[1
]}

Hamamoto, Nariaki ^{[1
]}

Hahto, Sami K. ^{[2
]}

Sacco, George ^{[2
]}

机构：

[1] Nissin Ion Equipment Co Ltd, 29 Hinokigaoka,Minakuchi Cho, Koka, Shiga, Japan

[2] Nissin Ion Equipment USA, 34 Sullivan Rd Suite 21, North Billerica, MA 01862 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2025年 / 563卷

关键词：

Ion implantation; Ion source; Ion beam; Multi slit; Manipulator; Life time;

D O I：

10.1016/j.nimb.2025.165705

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed a long indirectly heated cathode (IHC) ion source with a multi-slit electrodes system. With this ion source, it is possible to stably extract a sheet beam with a height of 300 mm. The beam is extracted through the four electrodes, which are composed of three slits. The current density of the extracted beam is not high. However, because the extraction aperture area is large, we can obtain a high current ion beam. In addition, by using a new developed manipulator for electrodes that can move in four directions, the beam can be efficiently passed through the electrodes. Our high current implanter installed this ion source for material modification recorded the maximum beam currents for carbon at 0.5 keV, 1 keV, and 25 keV of 32 mA, 39 mA, and 51 mA, respectively.

引用

页数：4

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