[1] Fudan Univ, Sch Microelect, Shanghai 200433, Peoples R China
[2] Fudan Univ, Sch Acad Engn & Technol, Shanghai 200433, Peoples R China
[3] East China Univ Sci & Technol, Key Lab Adv Control & Optimizat Chem Proc, Minist Educ, Shanghai 200237, Peoples R China