Static and dynamic characteristics of electrostatically actuated elliptical cross-section beams for NEMS applications

In this study, we investigate the static and dynamic characteristics of electrostatically actuated nanobeams with elliptical cross-sections, focusing on their potential applications in nano-electromechanical systems (NEMS). Using finite element analysis (FEA) in COMSOL Multiphysics, we explore the effects of key parameters on the nanobeams' performance. Our analysis includes a detailed examination of the static characteristic curves and natural frequencies under varying conditions. The study reveals significant insights into the behaviour of elliptical nanobeams, demonstrating how alterations in eccentricity and tilt angle influence the operational efficiency of NEMS devices. The impact of geometric variations on vibrational modes provide critical guidelines for designing robust and precise NEMS sensors and actuators.