Direct writing and modulating of diverse micro/nanostructures on glass substrate by using femtosecond laser

被引:0
作者
He, Ying-Zhi [1 ]
Li, Qian-Hua [2 ]
Xu, Guo-Juan [3 ]
Bai, Yue-Ying [1 ]
Luo, Ya-Dong [1 ]
Xu, Shi-Tong [1 ]
Ma, Ren-De [1 ]
Cao, Hong-Zhong [1 ]
机构
[1] Qufu Normal Univ, Laser Inst, Shandong Prov Key Lab Laser Polarizat & Informat T, Qufu 273165, Peoples R China
[2] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China
[3] Qufu Normal Univ, Sch Cyber Sci & Engn, Qufu 273165, Peoples R China
关键词
Raised wires; Dome-shaped nanostructures; Glass materials; Femtosecond laser direct writing; Laser induced equal material manufacturing; FUSED-SILICA; FABRICATION; ABLATION;
D O I
10.1016/j.optlaseng.2025.109020
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this work, the morphological changing processes of directly written micro/nanostructures from ablated trenches to raised wires and dome-shaped nanostructures on the glass substrate were systematically presented and investigated by using a femtosecond laser. The dome-shaped nanostructures with diameters of about 400 nm were fabricated. The results showed that each dome-shaped nanostructure was generated by a single pulse, the raised wires were composed of melts resulted from crowding and breaking of dome-shaped nanostructures, and the trenches were fabricated by the ablation and removal of raised wires at high irradiating energy. This work is a visualization for mechanism of fabricating glass micro/nanostructures in femtosecond laser direct writing process, and also provides evidences for fabricating micro/nanostructures on glass materials by using laser induced equal material manufacturing.
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页数:7
相关论文
共 27 条
[1]   High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser [J].
Bulushev, Evgeny ;
Bessmeltsev, Victor ;
Dostovalov, Alexandr ;
Goloshevsky, Nikolay ;
Wolf, Alexey .
OPTICS AND LASERS IN ENGINEERING, 2016, 79 :39-47
[2]   Additive and subtractive manufacturing of gold micro/nanostructures by using laser trapping and ablation [J].
Cao, Hong-Zhon ;
Cao, Liang-Chen ;
Fang, Gan ;
Zhaoc, Yuan-Yuan ;
Xud, Guo-Juan ;
Chen, Zhong-Yun ;
Duan, Xuan-Ming .
OPTICS AND LASERS IN ENGINEERING, 2022, 152
[3]   Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces [J].
Han, Ruozhong ;
Zhang, Yuchan ;
Jiang, Qilin ;
Chen, Long ;
Cao, Kaiqiang ;
Zhang, Shian ;
Feng, Donghai ;
Sun, Zhenrong ;
Jia, Tianqing .
OPTO-ELECTRONIC SCIENCE, 2024, 3 (03)
[4]   Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass [J].
He, Fei ;
Liao, Yang ;
Lin, Jintian ;
Song, Jiangxin ;
Qiao, Lingling ;
Cheng, Ya ;
Sugioka, Koji .
SENSORS, 2014, 14 (10) :19402-19440
[5]   Ultrafast processes for bulk modification of transparent materials [J].
Itoh, Kazuyoshi ;
Watanabe, Wataru ;
Nolte, Stefan ;
Schaffer, Chris B. .
MRS BULLETIN, 2006, 31 (08) :620-625
[6]   Fabrication of diamond ultra-fine structures by femtosecond laser [J].
Jiang, Tong ;
Gao, Si ;
Tian, Zhennan ;
Zhang, Hanzhuang ;
Niu, Ligang .
CHINESE OPTICS LETTERS, 2020, 18 (10)
[7]   Influence of processing parameters on the structure size of microchannel processed by femtosecond laser [J].
Lei, Chen ;
Pan, Zhang ;
Chen Jianxiong ;
Tu, Paul .
OPTICS AND LASER TECHNOLOGY, 2018, 106 :47-51
[8]   Efficient ultrafast laser writing with elliptical polarization [J].
Lei, Yuhao ;
Shayeganrad, Gholamreza ;
Wang, Huijun ;
Sakakura, Masaaki ;
Yu, Yanhao ;
Wang, Lei ;
Kliukin, Dmitrii ;
Skuja, Linards ;
Svirko, Yuri ;
Kazansky, Peter G. .
LIGHT-SCIENCE & APPLICATIONS, 2023, 12 (01)
[9]   Two-photon shape-modulated maskless lithography of positive photoresist of S1813 [J].
Li, Qian-Hua ;
Xu, Guo-Juan ;
Cheng, Chang ;
Zou, Rong ;
Li, Xiao-Jie ;
Ma, Ren-De ;
Cao, Hong-Zhong .
OPTICAL MATERIALS, 2023, 137
[10]   Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption [J].
Lin, Zhenyuan ;
Liu, Kuan ;
Cao, Tun ;
Hong, Minghui .
OPTO-ELECTRONIC ADVANCES, 2023, 6 (06)