[1] Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[3] Shanghai Photon View Technol Co Ltd, Shanghai 200444, Peoples R China
[4] Shanghai Jiao Tong Univ, Ruijin Hosp, Inst Med Chips, Sch Med, Shanghai 201800, Peoples R China
[5] Shanghai Ind Technol Res Inst SITRI, Shanghai 201800, Peoples R China
[6] Mixosense Co Ltd, Suzhou 215400, Peoples R China
[7] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100039, Peoples R China