An Onsite Calibration Procedure for Accurate Electrical Constants Measurement with Terahertz Time- Domain Ellipsometry

被引：0
|
作者：
Mai, Chia-Ming [1 ]
Yang, Shang-Hua [1 ]
机构：
[1] Natl TsingHua Univ, Inst Elect Engn, Hsinchu, Taiwan
来源：
2024 49TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ 2024 | 2024年
关键词：
ellipsometry; polarimetry; calibration; convex optimization; terahertz ellipsometry; semiconductor epitaxy films;
D O I：
10.1109/IRMMW-THz60956.2024.10697818
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work, an onsite calibration method based on gradient descent is presented, designated for electrical property estimation with terahertz time-domain ellipsometry. We first discuss the relation between angular installation error of polarizers, the possible incorrectness in incident angle and their effects in estimated sheet resistivity. Based on the results, we then developed an iterative procedure, to provide guidance for tuning the components, in order to calibrate the system accordingly.
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页数：2
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