SO2F2 is widely used for pest control in containers, buildings and gardens due to its strong diffusion capability and rapid action. However, SO2F2 is a toxic gas with a strong greenhouse effect. To mitigate the adverse impact of SO2F2 to the atmosphere and organisms, this paper studies its degradation using DBD plasma technology in this paper. The influence of filled glass beads on the degradation of SO2F2 was studied, and the decomposition process of SO2F2 gas molecules on the surface of SiO2 was analyzed through simulation. The results demonstrate that the DRE and EY of SO2F2 at a concentration of 2 % were 61.5 % and 7.2 g/kWh, respectively under the condition of flow rate of 150 mL/min and input power of 70 W in the without catalyst system. After filling SiO2 glass beads, the DRE and EY of SO2F2 were improved significantly, under the same conditions, they were increased to 91.48 % and 10.71 g/kWh, respectively. The main decomposition products of SO2F2 were SOF2, SO2, SOF4, OF2 and SiF4. Simulation results indicate that SO2F2 is gradually activated and and dissociated during the adsorption process on the SiO2 surface and the decomposition products such as SOF2, SOF and SO2 are generated during desorption. In this paper, the catalytic degradation mechanism of SO2F2 on the SiO2 surface was explained from the microscopic energy changes of decomposition reaction and the potential decomposition pathways of SO2F2 were analyzed based on experimental and simulation results. The relevant research results provide a valuable direction for the harmless degradation of SO2F2 exhaust gas.