Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application

被引：0

作者：

Patil, Ravindra ^{[1
]}

Karande, Aniket ^{[1
]}

Bhotkar, Ketan ^{[1
]}

Park, Kyu Chang ^{[1
]}

机构：

[1] Kyung Hee Univ, Informat Display, Seoul 02447, South Korea

来源：

2024 37TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE, IVNC 2024 | 2024年

关键词：

C-beam; Carbon nanotube; DC-PECVD; Phosphor screen imaging; Divergence angle; EMISSION; GROWTH; RATIO;

D O I：

10.1109/IVNC63480.2024.10652530

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This study successfully built a carbon nanotube (VACNT) cold cathode (C-beam) as a potential electron source for high-resolution scanning electron microscopes. The C-beam achieved a stable emission current with high transmission and a narrow beam divergence angle. These findings suggest VACNT C-beams hold promise for next-generation microscopy techniques.

引用

页数：2

共 30 条

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