[1] Zhengzhou Res Inst, Harbin Inst Technol, Zhengzhou 450000, Peoples R China
[2] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
[3] Tsinghua Univ, Dept Mech Engn, Beijing 100084, Peoples R China
[4] Harbin Inst Technol, Sch Mechatron Engn, Harbin 150001, Peoples R China
[5] Minist Educ, Harbin Inst Technol, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China
[6] Korea Adv Inst Sci & Technol KAIST, Dept Chem & Biomol Engn, Daejeon 34141, South Korea