Trap States in p-NiO/n-Ga2O3 Heterojunctions on Czochralski β-Ga2O3 Crystals

被引：1

作者：

Nikolaev, V. I. ^{[1
,2
]}

Polyakov, A. Y. ^{[2
]}

Krymov, V. M. ^{[1
]}

Saranin, D. S. ^{[1
]}

Chernykh, A. V. ^{[2
]}

Vasilev, A. A. ^{[2
]}

Schemerov, I. V. ^{[2
]}

Romanov, A. A. ^{[2
]}

Matros, N. R. ^{[2
]}

Kochkova, A. I. ^{[2
]}

Gostishchev, P. ^{[2
]}

Chernykh, S. V. ^{[2
]}

Shapenkov, S. V. ^{[1
]}

Butenko, P. N. ^{[1
,2
]}

Yakimov, E. B. ^{[2
,3
]}

Pearton, S. J. ^{[4
]}

机构：

[1] Perfect Crystals LLC, St Petersburg 194223, Russia

[2] Natl Univ Sci & Technol MISIS, Moscow 119049, Russia

[3] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Moscow Region, Russia

[4] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA

来源：

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 2024年 / 13卷 / 12期

关键词：

deep level transient spectroscopy; Ga2O3; gallium oxide; microelectronics - semiconductor materials; semiconductors;

D O I：

10.1149/2162-8777/ad9ace

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Heterojunctions (HJs) of p-NiO/n-Ga2O3 were prepared by deposition of thin films of p-NiO by ion beam sputtering on bulk nominally undoped (100) oriented n-Ga2O3 samples cleaved from Czochralski-grown (010) oriented crystal. Electrical properties and deep traps spectra were studied and compared with those obtained for similar samples with Ni Schottky diodes. Characteristic features of the NiO/Ga2O3 HJs are the built-in voltage of over 2 V compared to 1 V in Ni Schottky diodes, a strong frequency dispersion of capacitance due to the presence of high density over 10(18) cm(-3) of E-c-0.16 eV traps in the thin region adjacent to the NiO/Ga2O3 interface. For heterojunction diodes the strong increase of reverse current occurs at a much higher voltage than for Schottky diodes (120 V versus 60 V).

引用

页数：5

共 50 条

[11] Czochralski growth and characterization of β-Ga2O3 single crystals
Galazka, Z.
Uecker, R.
Irmscher, K.
Albrecht, M.
Klimm, D.
Pietsch, M.
Bruetzam, M.
Bertram, R.
Ganschow, S.
Fornari, R.
CRYSTAL RESEARCH AND TECHNOLOGY, 2010, 45 (12) : 1229 - 1236
[12] Trap States and Carrier Diffusion in Czochralski (100) Single Crystal β-Ga2O3
Nikolaev, V. I.
Polyakov, A. Y.
Krymov, V. M.
Shapenkov, S. V.
Butenko, P. N.
Yakimov, E. B.
Vasilev, A. A.
Schemerov, I. V.
Chernykh, A. V.
Matros, N. R.
Alexanyan, L. A.
Kochkova, A. I.
Pearton, S. J.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2024, 13 (01)
[13] Effect of the thin Ga2O3 layer in n+-ZnO/n-Ga2O3/p-Cu2O heterojunction solar cells
Minami, Tadatsugu
Nishi, Yuki
Miyata, Toshihiro
THIN SOLID FILMS, 2013, 549 : 65 - 69
[14] Recent advances in NiO/Ga2O3 heterojunctions for power electronics
Lu, Xing
Deng, Yuxin
Pei, Yanli
Chen, Zimin
Wang, Gang
JOURNAL OF SEMICONDUCTORS, 2023, 44 (06)
[15] Recent advances in NiO/Ga2O3 heterojunctions for power electronics
Xing Lu
Yuxin Deng
Yanli Pei
Zimin Chen
Gang Wang
Journal of Semiconductors, 2023, (06) : 28 - 42
[16] High Performance Deep Ultraviolet p-i-n Self-Powered Photodetector Based on p-NiO/i-β-Ga2O3/n-β-Ga2O3 With Controlled a Fermi Level and Used an Intrinsic β-Ga2O3 Layer
Kim, Hyungmin
Kim, Kyunghwan
Hong, Jeongsoo
IEEE SENSORS JOURNAL, 2024, 24 (11) : 17613 - 17621
[17] Luminescence and Conductivity of β-Ga2O3 and β-Ga2O3:Mg Single Crystals
Vasyltsiv, V.
Kostyk, L.
Tsvetkova, O.
Lys, R.
Kushlyk, M.
Pavlyk, B.
Luchechko, A.
ACTA PHYSICA POLONICA A, 2022, 141 (04) : 312 - 318
[18] Band offset and electrical properties of ErZO/ β-Ga2O3 and GZO/ β-Ga2O3 heterojunctions
Shi, Ying-Li
Huang, Dong
Ling, Francis Chi-Chung
APPLIED SURFACE SCIENCE, 2022, 576
[19] Conductivity of Ga2O3–GaAs Heterojunctions
V. M. Kalygina
I. L. Remizova
O. P. Tolbanov
Semiconductors, 2018, 52 : 143 - 149
[20] On the bulk β-Ga2O3 single crystals grown by the Czochralski method
Galazka, Zbigniew
Irmscher, Klaus
Uecker, Reinhard
Bertram, Rainer
Pietsch, Mike
Kwasniewski, Albert
Naumann, Martin
Schulz, Tobias
Schewski, Robert
Klimm, Detlef
Bickermann, Matthias
JOURNAL OF CRYSTAL GROWTH, 2014, 404 : 184 - 191

← 1 2 3 4 5 →