Advancing Graphene Synthesis: Low-Temperature Growth and Hydrogenation Mechanisms Using Plasma-Enhanced Chemical Vapor Deposition

被引:2
作者
Meskinis, Sarunas [1 ]
Lazauskas, Algirdas [1 ]
Jankauskas, Sarunas [1 ]
Guobiene, Asta [1 ]
Gudaitis, Rimantas [1 ]
机构
[1] Kaunas Univ Technol, Inst Mat Sci, K Barsausko 59, LT-51423 Kaunas, Lithuania
关键词
PECVD; graphene synthesis; low-temperature growth; hydrogenated graphene; REVERSIBLE HYDROGENATION; VERTICAL GRAPHENE; RAMAN; CARBON; IDENTIFICATION;
D O I
10.3390/molecules30010033
中图分类号
Q5 [生物化学]; Q7 [分子生物学];
学科分类号
071010 ; 081704 ;
摘要
This study explores the low-temperature synthesis of graphene using plasma-enhanced chemical vapor deposition (PECVD), emphasizing the optimization of process parameters to achieve controlled growth of pristine and hydrogenated graphene. Graphene films were synthesized at temperatures ranging from 700 degrees C to as low as 400 degrees C by varying methane (25-100 sccm) and hydrogen (25-100 sccm) gas flow rates under 10-20 mBar pressures. Raman spectroscopy revealed structural transitions: pristine graphene grown at 700 degrees C exhibited strong 2D peaks with an I(2D)/I(G) ratio > 2, while hydrogenated graphene synthesized at 500 degrees C showed increased defect density with an I(D)/I(G) ratio of similar to 1.5 and reduced I(2D)/I(G) (similar to 0.8). At 400 degrees C, the material transitioned to a highly hydrogenated amorphous carbon film, confirmed by photoluminescence (PL) in the Raman spectra. Atomic force microscopy (AFM) showed pristine graphene with a root mean square roughness (R-q) of 0.37 nm. By carefully adjusting PECVD synthesis parameters, it was possible to tune the surface roughness of hydrogenated graphene to levels close to that of pristine graphene or to achieve even smoother surfaces. Conductive AFM measurements revealed that hydrogenation could enhance graphene's contact current under specific conditions. The findings highlight the role of PECVD parameters in tailoring graphene's structural, morphological, and electronic properties for diverse applications. This work demonstrates a scalable, low-temperature approach to graphene synthesis, offering the potential for energy storage, sensing, and electronic devices requiring customized material properties.
引用
收藏
页数:16
相关论文
共 59 条
[1]   Identifying suitable substrates for high-quality graphene-based heterostructures [J].
Banszerus, L. ;
Janssen, H. ;
Otto, M. ;
Epping, A. ;
Taniguchi, T. ;
Watanabe, K. ;
Beschoten, B. ;
Neumaier, D. ;
Stampfer, C. .
2D MATERIALS, 2017, 4 (02)
[2]   Plasma-enhanced chemical vapor deposition synthesis of vertically oriented graphene nanosheets [J].
Bo, Zheng ;
Yang, Yong ;
Chen, Junhong ;
Yu, Kehan ;
Yan, Jianhua ;
Cen, Kefa .
NANOSCALE, 2013, 5 (12) :5180-5204
[3]   Facile graphene n-doping by wet chemical treatment for electronic applications [J].
Bong, Jae Hoon ;
Sul, Onejae ;
Yoon, Alexander ;
Choi, Sung-Yool ;
Cho, Byung Jin .
NANOSCALE, 2014, 6 (15) :8503-8508
[4]   Raman fingerprint of charged impurities in graphene [J].
Casiraghi, C. ;
Pisana, S. ;
Novoselov, K. S. ;
Geim, A. K. ;
Ferrari, A. C. .
APPLIED PHYSICS LETTERS, 2007, 91 (23)
[5]   Bonding in hydrogenated diamond-like carbon by Raman spectroscopy [J].
Casiraghi, C ;
Piazza, F ;
Ferrari, AC ;
Grambole, D ;
Robertson, J .
DIAMOND AND RELATED MATERIALS, 2005, 14 (3-7) :1098-1102
[6]   Probing disorder and charged impurities in graphene by Raman spectroscopy [J].
Casiraghi, Cinzia .
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2009, 3 (06) :175-177
[7]   Effect of temperature on graphene grown by chemical vapor deposition [J].
Chaitoglou, Stefanos ;
Bertran, Enric .
JOURNAL OF MATERIALS SCIENCE, 2017, 52 (13) :8348-8356
[8]   Effect of oxygen plasma etching on graphene studied using Raman spectroscopy and electronic transport measurements [J].
Childres, Isaac ;
Jauregui, Luis A. ;
Tian, Jifa ;
Chen, Yong P. .
NEW JOURNAL OF PHYSICS, 2011, 13
[9]   Behavior of graphene under glow discharge plasma [J].
Clapa, Marian ;
Gaj, Justyna .
SENSORS AND ACTUATORS A-PHYSICAL, 2021, 332
[10]   Identification and discrimination of polycyclic aromatic hydrocarbons using Raman spectroscopy [J].
Cloutis, Edward ;
Szymanski, Paul ;
Applin, Daniel ;
Goltz, Douglas .
ICARUS, 2016, 274 :211-230